Canon Kabushiki Kaisha

Yusuke Kasai

Takashi Seki

Shigeki Kato

Takayuki Uozumi

Hiroshi Kawanago

A measuring apparatus that measures an optical characteristic of a surface in accordance with a standard selected from a plurality of standards is provided. The apparatus includes an illumination device configured to illuminate the surface with light from a light source, an imaging device configured to image the light source with reflected light from the surface illuminated by the illumination device, and a processor configured to process image data having number of pixels obtained by reducing number of pixels of the imaging device by a reduction rate to obtain the optical characteristic of the surface. The processor is configured to determine the reduction rate based on the selected standard.

Optical characteristic measuring apparatus

A measuring apparatus includes an optical system configured to project light onto a sample and to receive light via the sample, an imaging device configured to take an image of a light source via the optical system, and a processor configured to obtain an optical characteristic of the sample based on an output of the imaging device. The processor is configured to determine a coefficient of a Wiener filter based on one of the image and a Fourier transform thereof and corresponding one of the light source (an aperture in an aperture unit) and a Fourier transform thereof, and obtain the optical characteristic based on the Wiener filter of which the coefficient has been determined, a Fourier transform of the image, and a Fourier transform of the light source.

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Saitama, Japan

Yusuke Kasai