Average Co-Inventor Count = 2.18
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Speedfam Co Ltd (3 from 57 patents)
2. Fuji Xerox Co., Ltd. (1 from 11,665 patents)
4 patents:
1. 8244156 - Method for producing cleaning device and cleaning device
2. 7147541 - Thickness control method and double side polisher
3. 7137867 - Thickness control method and double side polisher
4. 6012193 - Apparatus for washing disc-shaped workpieces