Kabushiki Kaisha Toshiba

Yuriko Kato

Hiroaki Yamazaki

Etsuji Ogawa

Takayuki Masunaga

According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, and a second electrode arranged above the first electrode, facing the first electrode, and vertically movable. The second electrode includes a second opening portion that penetrates from an upper surface to a lower surface of the second electrode. The first electrode includes a first opening portion at a position corresponding to at least a part of the second opening portion, the first opening portion penetrating from an upper surface to a lower surface of the first electrode.

Growing community of inventors

Yokohama, Japan

Yuriko Kato