Applied Materials, Inc.

Yunshuang Ding

Brian J Brown

Jianshe Tang

Hui W Chen

Jim Kellogg Atkinson

Yufei Chen

Clinton P Sakata

In some embodiments, an apparatus for cleaning a substrate is provided that includes (1) a substrate chuck configured to support a substrate with a front side of the substrate accessible; (2) a buff pad assembly configured to support a buff pad having a diameter smaller than a diameter of the substrate; and (3) a swing arm coupled to the buff pad and configured to position and rotate the buff pad along the front side of the substrate, and control an amount of force applied by the buff pad against the front side of the substrate during cleaning. The substrate chuck, buff pad assembly and swing arm are configured to buff clean the substrate. Numerous additional aspects are disclosed.

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Fremont, CA, United States of America

Yunshuang Ding