Industrial Technology Research Institute

Cm Visual Technology Corporation

National Taiwan University

Yung-Pin Chen

Lon A Wang

Jer-Haur Chang

Hung-Yu Lin

Hsin-Wen Chang

Shuo-Hung Chang

Chih-Sheng Jao

Yuet-Ping Lee

An optical element including a first pattern is provided. The first pattern includes a film and a plurality of light deflection regions arranged on the film, wherein each light deflection region comprises a diffraction structure having two or more than two amplitudes.

Optical element and display device using the same

An optical element including a first pattern is provided. The first pattern includes a plurality of light deflection regions arranged along at least one set of first tracks in a first direction, and each first track is a waveform track having a first period Tand a first amplitude A.

The present invention provides a method and an apparatus for generating periodic patterns by step-and-align interference lithography, wherein at least two coherent light beams with a pattern are controlled to project onto a substrate to be exposed to form an interference-patterned region on the substrate. Thereafter, by means of moving the substrate or the light beams stepwisely, a patterned region with a large area can be formed on the substrate. According to the present invention, the optical path and exposure time may be shortened to reduce defect formation during lithographic processing and to improve the yield.

Method and apparatus for generating periodic patterns by step-and-align interference lithography

Disclosed is a method of micro/nano imprinting, which applies soft mold, pre-shaping sealing film, and soft holder arrangements to the micro/nano structure imprinting process of the curved substrates. The method of the present invention can prevent the curved surface from crumbling, which may result from high gas pressuring, and can obtain uniform imprinting pressure distribution throughout the whole curved substrate. Moreover, replicating micro/nano structures onto double-sided curve, both convex and concave, surfaces can also be achieved.

Growing community of inventors

Tainan, Taiwan

Yung-Pin Chen