Asml Netherlands B.v.

Yunbo Guo

Qiang Zhang

Chen Zhang

Yen-Wen Lu

Jen-Shiang Wang

Mu Feng

Qian Zhao

Jiao Liang

Zhu Wang

Feng Yang

A method for improving a process model for a patterning process, the method including obtaining a) a measured contour from an image capture device, and b) a simulated contour generated from a simulation of the process model. The method also includes aligning the measured contour with the simulated contour by determining an offset between the measured contour and the simulated contour. The process model is calibrated to reduce a difference, computed based on the determined offset, between the simulated contour and the measured contour.

Method for improving a process for a patterning process

A method for improving a process model by measuring a feature on a printed design that was constructed based in part on a target design is disclosed. The method includes obtaining a) an image of the printed design from an image capture device and b) contours based on shapes in the image. The method also includes identifying, by a pattern recognition program, patterns on the target design that include the feature and determining coordinates, on the contours, that correspond to the feature. The method further includes improving the process model by at least a) providing a measurement of the feature based on the coordinates and b) calibrating the process model based on a comparison of the measurement with a corresponding feature in the target design.

Utilize pattern recognition to improve SEM contour measurement accuracy and stability automatically

Growing community of inventors

San Jose, CA, United States of America

Yunbo Guo