Samsung Electro-Mechanics Co., Ltd.

Daewoo Electronics Co., Ltd.

Yun-Jin Ko

Jong-Hyeong Song

Seung-Do An

Je-Hong Kyoung

Jeong-Suong Yang

Jae-Wook Jang

Na-Young Ryu

Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.

Spatial optical modulator with passivation layer

An optical modulator having a junction layer is disclosed. An optical modulator may be provided which includes a substrate, an insulation layer positioned on the substrate, a ribbon layer positioned with an intermediate portion spaced apart from the insulation layer by a predetermined distance, a protective layer positioned on both ends of the ribbon layer, a junction layer positioned on the protective layer which has an adhesive property and which prevents the diffusion of gas, and a piezoelectric element joined with the protective layer by way of the junction layer interposed in-between which moves the intermediate portion of the ribbon layer toward and away from the substrate. In certain embodiments of the invention, the light diffraction property and reliability of the overall optical modulator can be maximized, by positioning a junction layer, having improved adhesion and capable of preventing the diffusion of oxygen, on the lower surface of the piezoelectric elements.

Optical modulator

An array of thin film actuated mirrors includes: an active matrix including a substrate, an array of connecting terminals; and an array of actuating structures, each of the actuating structures including an upper electrode functioning as a mirror as well as a common bias electrode, an electrodisplacive member made of a piezoelectric material, a seeding member made of a material having the same crystal structure and growth direction as that of the piezoelectric material constituting the electrodisplacive member, a lower electrode functioning as a signal electrode, an elastic member and a via contact.

Thin film actuated mirror including a seeding member and an

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Seoul, South Korea

Yun-Jin Ko