Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lg Semicon Co., Ltd. (2 from 1,027 patents)
2 patents:
1. 6004397 - TEOS-O.sub.3 oxidizing film depositing system and process for supplying
2. 5891810 - Process for supplying ozone (O.sub.3) to TEOS-O.sub.3 oxidizing film