Taiwan Semiconductor Manufacturing Comp. Ltd.

Yun-Han Chen

Sung-Chieh Lin

Chen-Ming Hung

Kuoyuan (Peter) Hsu

Wei-Li Liao

Li-Chun Tien

Yue-Der Chih

Shao-Yu Chou

Kuo-Yuan Hsu

Shao-Tung Peng

Shao-Cheng Wang

A circuit includes a fuse cell, a sense circuit and an output control circuit. The fuse cell includes an electrical fuse. The sense circuit is electrically coupled to the fuse cell and configured for generating a sense signal indicative of a programmed condition of the electrical fuse, at an output of the sense circuit. The output control circuit is electrically coupled to the output of the sense circuit, and the output control circuit is configured for latching the sense signal indicative of the electrical fuse having been programmed, during a read operation of the fuse cell.

Generating stabilized output signals during fuse read operations

A fuse structure comprises a first conductive layer on a first level. The first conductive layer comprises a fuse line extending in a first direction. The fuse line has a first end portion, a second end portion opposite the first end portion, and a fuse link portion connecting the first end portion and the second end portion. The first conductive layer also comprises lines parallel to the fuse line, the lines being aligned in the first direction and being separated from one another by a first distance measured in the first direction. The fuse structure also comprises a second conductive layer on a second level different from the first level and coupled with the first conductive layer. The second conductive layer has parallel lines extending in a second direction, the parallel lines being separated by a second distance measured in a third direction orthogonal to the second direction.

Fuse structure

A method includes, by a first circuit, converting a plurality of bits in a first format to a second format. The plurality of bits in the second format is used, by a second circuit, to program a plurality of memory cells corresponding to the plurality of bits. The first format is a parallel format. The second format is a serial format. The first circuit and the second circuit are electrically coupled together in a chip. In some embodiments, the plurality of bits includes address information, cell data information, and program information of a memory cell that has an error. In some embodiments, the plurality of bits includes word data information of a word and error code and correction information corresponding to the word data information of the word.

Memory error correction

The embodiments of methods and structures disclosed herein provide mechanisms of forming and programming a metal-via fuse. The metal-via fuse and a programming transistor form a one-time programmable (OTP) memory cell. The metal-via fuse has a high resistance and can be programmed with a low programming voltage, which expands the programming window.

Metal-via fuse

Growing community of inventors

Chiayi, Taiwan

Yun-Han Chen