University of California

Yun Goo Ro

Shadi A Dayeh

Atsunori Tanaka

James F Buckwalter

Yoontae Hwang

Ren Liu

Renjie Chen

Siarhei Vishniakou

Sang Heon Lee

Namseok Park

Ahmed Youssef

Cooper Levy

A nanowire probe sensor array including a substrate with a metal pattern thereon. An array of semiconductor vertical nanowire probes extends away from the substrate, and at least some of probes, and preferably all, are individually electrically addressed through the metal pattern. The metal pattern is insulated with dielectric, and base and stem portions of the nanowires are also preferably insulated. A fabrication process patterns metal connections on a substrate. A semiconductor substrate is bonded to the metal pattern. The semiconductor substrate is etched to form the neural nanowire probes that are bonded to the metal pattern. Dielectric is then deposited to insulate the metal pattern.

Addressable vertical nanowire probe arrays and fabrication methods

Methods and devices that monolithically integrate thin film elements/devices, e.g., environmental sensors, batteries and biosensors, with high performance integrated circuits, i.e., integrated circuits formed in a high quality device layer. Preferred embodiments further monolithically integrate a solar cell array. Preferred embodiments provide pin-size and integrated solar powered wearable electronic, ionic, molecular, radiation, etc. sensors and circuits.

Monolithic thin film elements and performance electronics, solar powered systems and fabrication

Growing community of inventors

La Jolla, CA, United States of America

Yun Goo Ro