Fujian Jinhua Integrated Circuit Co., Ltd.

Yun-Fan Chou

Yu-Cheng Tung

Hsien-Shih Chu

Yaoguang Xu

Chaoxiong Wang

A DRAM includes a substrate, a plurality of first active regions disposed on the substrate and arranged end-to-end along the first direction, and a plurality of second active regions disposed between the first active regions and arranged end-to-end along the first direction. The second active regions respectively have a first sidewall adjacent to a first trench between the second active region and one of the first active regions and a second sidewall adjacent to a second trench between the ends of the first active regions, wherein the second sidewall is taper than the first sidewall in a cross-sectional view.

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Taichung, Taiwan

Yun-Fan Chou