Screen Holdings Co., Ltd.

Yumiko Hirato

Hideji Naohara

Shinji Yamamoto

Tomonori Fujiwara

Tetsuya Yamamoto

Shota Ueda

Anfen Ye

Atsushi Sonoda

Display screen or portion thereof with graphical user interface

Display screen or portion thereof with transitional graphical user interface

A data processing method includes a step of obtaining evaluated values of the time-series data by comparing the time-series data with reference data, a step of classifying the evaluated values into a plurality of levels, a step of displaying an evaluation result screen including a display area including a first graph showing an occurrence rate of each level of the evaluated values, the evaluation result screen including the display area with respect to each of the two or more processing units. A history screen displaying a history in which the evaluated values have been obtained and a trend screen including graphs showing temporal change in the evaluated values in addition to the evaluation result screen is hierarchically displayed. A mark is attached at a position corresponding to a processing result selected in the history screen in a graph in the trend screen.

Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon

A data processing method includes a step of obtaining scores of time-series data by comparing the time-series data with reference data in order to process time-series data acquired in a substrate processing apparatus having one or more processing units, a step of classifying the scores into a plurality of levels, and a step of displaying an evaluation result screen including a display area including a graph showing an occurrence rate of each level of the scores, the number of occurrences of each level, and a graph showing temporal change in the number of occurrences of a worst level of the scores when substrates have been processed through a predetermined method with respect to each of the two or more processing units. Accordingly, a data processing method through which a state of the substrate processing apparatus can be easily ascertained is provided.

In order to process time series data obtained in a substrate processing apparatus having a plurality of processing units, a data processing method includes an evaluation value calculation step of obtaining a score of the time series data by comparing the time series data with reference data, and a result display step of displaying an evaluation result screen including, for each processing unit, a number of score errors being a number of substrates of which score is abnormal, and a pie chart showing a ratio of the number of score errors to a number of processed substrates. A display size of the number of score errors and that of the pie chart change depending on the number of score errors.

Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program

A data processing method includes a step of obtaining scores of time-series data by comparing the time-series data with reference data in order to process time-series data acquired in a substrate processing apparatus having one or more processing units, a step of classifying the scores into a plurality of levels, and a step of displaying an evaluation result screen including a graph showing an occurrence rate of each level of the scores, the number of occurrences of each level, and a graph showing temporal change in the number of occurrences of a worst level of the scores when substrates have been processed through a predetermined method with respect to the processing units. Accordingly, a data processing method through which a state of the substrate processing apparatus can be easily ascertained is provided.

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Kyoto, Japan

Yumiko Hirato