Changxin Memory Technologies, Inc.

Yulei Wu

Xiaoguang Wang

Baolei Wu

Er-Xuan Ping

Erxuan Ping

Bin Yang

Er-xuan Ping

The present disclosure provides a method of forming a capacitor hole, and a semiconductor structure. The method includes: providing a substrate, where an electrode is formed in the substrate; forming a pattern definition layer on a surface of the substrate; sequentially forming three sets of trenches in the pattern definition layer, where the three sets of trenches intersect with each other at 120°, and a hexagonal hole is formed at an intersection position in the pattern definition layer; etching the substrate along the hexagonal hole by the pattern definition layer as a mask, to form a capacitor hole in the substrate, where a bottom of the capacitor hole is round under a loading effect of etching, and the electrode is exposed at the bottom of the capacitor hole.

Method of forming capacitor hole, and semiconductor structure

The present disclosure provides a semiconductor structure and a semiconductor device. The semiconductor structure includes a first conductive layer, a first barrier layer, and an insulating layer. The first conductive layer includes at least two traces, and a recess is formed between two adjacent ones of the traces. The first barrier layer is provided on a sidewall of the recess. The insulating layer fills the recess, and an air gap is formed in the insulating layer located in the recess.

Semiconductor structure and semiconductor device

A method for manufacturing a semiconductor structure includes: providing a substrate; forming a first shielding layer on the substrate; forming a first electrode penetrating the first shielding layer; forming a storage structure on the first electrode; forming a second shielding layer on the top surface and sidewalls of the storage structure, wherein the first shielding layer and the second shielding layer combine into one integrated shielding layer; and forming a second electrode which penetrates the shielding layer and electrically connects to the storage structure.

Semiconductor structure including two shielding layers and manufacturing method thereof

The present disclosure provides a method of manufacturing a semiconductor structure and a semiconductor structure. The method of manufacturing a semiconductor structure includes: providing a substrate; forming bottom contact structures in the substrate; forming a storage unit on each of the bottom contact structures; and forming shielding structures that each wrap around one of the storage units, wherein the shielding structures each include multiple dielectric layers and shielding layers arranged alternately.

Method of manufacturing semiconductor structure and semiconductor structure

The present disclosure provides a manufacturing method of a semiconductor structure, and a semiconductor structure. The manufacturing method of a semiconductor structure includes: forming a plurality of cylindrical capacitors in an initial structure; removing part of the initial structure to form trenches, the trenches expose partial sidewalls of the cylindrical capacitors and a substrate of the initial structure; forming a dielectric layer, the dielectric layer at least covers an exposed surface of each of the cylindrical capacitors; forming a first top electrode, the first top electrode covers a surface of the dielectric layer; and forming a second top electrode, the second top electrode covers a surface of the first top electrode. In an axial direction of each of the cylindrical capacitors, the second top electrode formed in each of the trenches has a discontinuous part, and an air gap is formed in the discontinuous part of the second top electrode.

Semiconductor structure and manufacturing method thereof

Embodiments of the present invention provide a storage cell and a data read/write method and storage array thereof. The storage cell includes a bit line, a tunnel junction, and four access transistors. Each access transistor includes at least an active region. The active region includes a source. The sources of the access transistors are all electrically connected to a first end of the tunnel junction. A second end of the tunnel junction is electrically connected to the bit line, and the bit line extends along a first direction. The active regions of the access transistors are isolated from one another. Long-side extension directions of the active regions of the access transistors are the same, and a first angle θ is formed between the long-side extension directions of the active regions and the first direction; wherein θ is a non-right angle.

Storage cell and data read/write method and storage array thereof

The present disclosure provides a method for manufacturing a semiconductor structure and a semiconductor structure. The method for manufacturing a semiconductor structure includes: forming a plurality of capacitor holes on a substrate, and exposing a part of the substrate on bottoms of the capacitor holes; forming a bottom electrode layer on surfaces of the capacitor holes; forming, on a surface of the bottom electrode layer, a dielectric layer continuously covering the surface of the bottom electrode layer; forming a first top electrode layer to continuously cover a surface of the dielectric layer by a first film forming process; by a second film forming process, forming, in a circumferential direction of the capacitor holes, a second top electrode layer continuously covering a surface of the first top electrode layer, and forming, in an axial direction of the capacitor holes.

Method for manufacturing semiconductor structure and semiconductor structure

The present disclosure provides a memory array, a memory cell, and a data read and write method thereof. Two storage nodes are provided in each memory cell of a memory array of a magnetic random access memory (MRAM), such that when one storage node in the memory cell fails, the other storage node in the memory cell can be used to write and read data.

Memory array, memory cell, and data read and write method thereof

Provided is a semiconductor structure, a memory cell and a memory array. An nT-MRAM can be realized by a relatively simple structure. Transistors connected to multiple MTJs are connected by connecting pads.

Semiconductor structure, memory cell and memory array

The present application provides a magnetic memory and a reading/writing method thereof. The magnetic memory includes at least one cell layer, the cell layer including: a plurality of paralleled first conductors located in a first plane; a plurality of paralleled second conductors located in a second plane, the first plane being parallel to the second plane, a projection of the second conductor on the first plane intersecting with the first conductor; a plurality of memory elements arranged between the first plane and the second plane, the memory element including a magnetic tunnel junction and a bidirectional gating device arranged in series along a direction perpendicular to the first plane, the magnetic tunnel junction being connected to the first conductor, the bidirectional gating device being connected to the second conductor, and the bidirectional gating device being configured to be turned on when a threshold voltage and/or a threshold current are/is applied.

Magnetic memory and reading/writing method thereof

The present application makes public a magnetic memory and a reading/writing method thereof, which magnetic memory comprises at least one cell layer, and the cell layer includes a plurality of parallel second wires that are disposed in a second plane, the first plane being parallel to the second plane, and projections of the second wires onto the first plane intercrossing the first wires; a plurality of storage elements that are disposed between the first plane and the second plane, the storage elements including magnetic tunnel junctions and bi-directional gating components connected in series along a direction perpendicular to the first plane, the magnetic tunnel junctions being connected to the first wires, the bi-directional gating components being connected to the second wires, and the bi-directional gating components being configured to be conductive upon application of a threshold voltage and/or a threshold current.

Method of fabricating a semiconductor device

The present disclosure provides a semiconductor structure and a storage circuit that implements the storage structure of a magnetoresistive random access memory (MRAM) based on a dynamic random access memory (DRAM) fabrication platform.

Semiconductor structure and storage circuit

A memory and a read and write method of memory can prevent the magnetic random-access memory (MRAM) from being easily damaged or degraded by excessive write current during use, and increase memory integration density. The memory includes: a storage unit, comprising a storage element; a source line, electrically connected to a first end of the storage element; the memory is configured to change a storage state of the storage element by a first current and a second current, the first current flowing through the storage element and the second current flowing through the source line without flowing through the storage element.

Memory and read and write methods of memory

A memory includes: a substrate, having a plurality of active regions arranged in an array and a plurality of word lines extending in a first direction, the active regions being inclined at a preset angle to the word lines, the active region having at least one access transistor; a plurality of bit lines, extending in a second direction perpendicular to the first direction; magnetic tunnel junctions, one end of the magnetic tunnel junction is electrically connected to one of bit lines and another end of the magnetic tunnel junction is electrically connected to two access transistors, the two access transistors electrically connected to the magnetic tunnel junction being located in two adjacent active regions, respectively.

Memory and forming methods and control methods thereof

A manufacturing method of a semiconductor structure includes: providing a target layer; forming a plurality of first mask patterns on a top surface of the target layer; forming a plurality of second mask patterns above the target layer, where each of the second mask patterns covers at least a part of a top surface of each of the first mask patterns and a part of the top surface of the target layer in an extension direction of the second mask pattern; performing a first etching on the target layer based on the second mask patterns; removing the second mask patterns; and performing a second etching on the target layer based on the first mask patterns.

Growing community of inventors

Hefei, China

Yulei Wu