Hitachi, Ltd.

Nec Corporation

Hitachi High-tech Corporation

Yuko Okada

Hiroshi Yamamoto

Takeshi Fujita

Hiroki Takahashi

Kichio Nakajima

Akihiko Okamoto

Masanori Suzuki

Masaki Hasegawa

Hironori Ogawa

Fuminori Ito

Kazuo Konuma

Yoshinori Tomihari

Taro Iwamoto

Minoru Sasaki

Tomohiko Ogata

Akira Doi

Isao Furuse

Yukio Sumiya

Takuto Yagihashi

A particle beam therapy apparatus has a position and posture setter that moves a movable body, that is at least one of the irradiation nozzle and the treatment table. A movement path of the movable body is determined when adapting the positional posture of the movable body from one condition among a plurality of prescribed conditions to another condition. An evaluation value is obtained for adapting the positional posture of the movable body to each of a plurality of prescribed conditions. This evaluation value is for a case of moving the movable body according to the movement path. A setting order is determined for adapting the positional posture of the movable body to each prescribed condition based on the evaluation value; and the positional posture of the movable body is adapted to each of the plurality of prescribed conditions by moving the movable body according to the determined movement path.

Particle beam therapy apparatus and control method thereof

The present disclosure provides a wafer inspection technology that involves less degradation of the image quality even when an object to be observed has a variation in height due to warpage, etc. of a wafer. This wafer inspection apparatus obtains an image with less degradation by: adjusting the focal point of an observation optical system to a height measured by a height sensor for measuring wafer surface heights; and further, correcting a switching signal for a CCD line sensor on the basis of stage position data and optical magnification data corresponding to the height so as to make a correction corresponding to the wafer surface height.

Wafer inspection apparatus and wafer inspection method

A fabrication method for an emitter includes the steps of forming on a glass substrate a CNT film which contains a plurality of carbon nanotubes (CNTs) and constitutes an emitter electrode, forming a gate electrode via an insulating film on the CNT film, forming a plurality of gate openings in the gate electrode and the insulating film, and aligning upright the CNTs in the gate opening. The upright alignment generates a stable uniform emission current and provides excellent emission characteristics.

CNT film and field-emission cold cathode comprising the same

The present invention provides a method of carrying out an electric discharge processing to an electron tube having a field emission cold cathode device, wherein at least a high voltage electrode of the electron tube is maintained in a high voltage range, whilst all electrodes of the electron tube except for the at least high voltage electrode are maintained in a lower voltage range than the high voltage range.

Electric discharge processing method for an electron tube using a field emission cold cathode device

A stereoscopic imaging system enabling observation of a stereoscopic image due to parallax by reproducing, on a single screen in an image-reproducing means two kinds of images of an object which are taken by two imaging units and between which there is parallax and by observing the images in such a manner that the left and right eyes of the observer observe only the separate images taken by the separate imaging units corresponding to the left and right eyes, wherein there is provided swing means for mechanically or electronically shifting the optical axes of the respective lenses of said two imaging units, by which swing means the observer can view a stereoscopic image without fatigue and in a natural condition.

Stereoscopic imaging system

Growing community of inventors

Tokyo, Japan

Yuko Okada