Kioxia Corporation

Yuko Kono

Youyang Ng

Takuji Ohashi

Chihiro Ida

Atsushi Nakajima

A semiconductor image processing apparatus has an image input unit inputs a first semiconductor image, an exposure condition input unit configured to input exposure conditions, a generator performs a process of extracting a feature amount in consideration of the exposure conditions while reducing resolution of the first semiconductor image and thereafter use the extracted feature amount to increase the resolution to generate a second semiconductor image, and a discriminator configured to discriminate whether the input image is the second semiconductor image or a third semiconductor image provided in advance. The generator performs learning so that the discriminator erroneously discriminates the second semiconductor image as the third semiconductor image based on a result discriminated by the discriminator. The discriminator performs learning so as not to erroneously discriminate the second semiconductor image as the third semiconductor image, and not to erroneously discriminate the third semiconductor image as the second semiconductor image.

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Shinagawa, Japan

Yuko Kono