Kyocera Corporation

Yuko Fukawa

Yosuke Inomata

Shuichi Fujii

Mitsuo Yamashita

Koichiro Niira

Tomonari Sakamoto

Hiroshi Morita

Koji Nishi

Tatsuya Yashiki

Kenji Fukui

Yasuhiro Matsubara

A surface electrode () is installed on the light receiving surface of a solar cell element, the surface electrode () comprises three bus bar electrodes () for extracting light-produced at the solar cell element to the outside and collecting finger electrodes () connected to these bus bar electrodes (), and the bus bar electrodes () are not less than 0.5 mm and not more than 2 mm in width and the finger electrodes () are not less than 0.05 mm and not more than 0.1 mm in width. A high-efficient solar cell module can be obtained with substantially lowered resistance by increasing the number of bus bar electrode () and thereby decreasing the lengths of the finger electrodes ().

Solar cell module and photovoltaic power generator using the same

There is presented a solar cell comprising a semiconductor substrate of one conductivity-type, a layer of the opposite conductivity-type provided on a surface side of the semiconductor substrate, a surface electrode formed thereon, and a backside electrode formed on a backside of the semiconductor substrate, wherein the semiconductor substrate is formed with protrusions and recesses on the surface side thereof, and spaces that are filled with a glass component of an electrode material of the surface electrode are present in bottom portions of the recesses. This arrangement has eliminated a conventional problem in that silver in the electrode material gets into the bottom portions of the recesses and causes defects to be generated in the recesses due to stress generated during forming of the electrode.

Solar cell, manufacturing method thereof and electrode material

A dry etching apparatus including a plateprovided in parallel or nearly parallel with an RF electrodeto cover a substrateplaced on the RF electrodedirectly or through a tray. The plateis provided with planar or nearly planar obstaclesthat inhibit a gas and plasma from passing through the plateas well as opening portions. This makes it possible to achieve conditions under which etching residues attach to the surface of the substrate faster by trapping the etching residues in a space between the surface of the substrateand the plate. Fine textures can be thus formed efficiently on the surface of the substrate (FIG.).

Method for producing a solar cell

A dry etching apparatus that performs etching on a substrateplaced on a trayinside a chamberby covering the substratewith a plateprovided with opening portionsin which a distance D between the surface opposing the substrateand the substratein the peripheral portion of the plateis set shorter than the distance D between the surface opposing the substrateand the substratein the central portion of the plate. Textures can be thus formed homogeneously on the surface of the substrate.

Dry etching apparatus, dry etching method, and plate and tray used therein

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Yokaichi, Japan

Yuko Fukawa