Kabushiki Kaisha Yaskawa Denki

Yukito Sagasaki

Kazunori Hino

Hiroki Sanemasa

Kazunari Shiraishi

Hitoshi Wakizako

Ken-ichi Motonaga

A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.

Growing community of inventors

Fukuoka, Japan

Yukito Sagasaki