Kabushiki Kaisha Kobe Seiko Sho

Yukito Furukawa

Norio Suzuki

Yutaka Kawata

Kiyotaka Ishibashi

Akira Kobayashi

Ken-ichi Inoue

Koji Inoue

Shigeto Adachi

Kenichi Inoue

Mitsuo Terada

Takuya Kusaka

Kouji Inoue

Hirofumi Fukuyama

Akio Arai

Keizo Tokushige

Kaneo Yamada

Sunao Takahashi

Makoto Kimura

Toshiji Suzuki

Tetsuo Tokumura

Kazushi Yokoyama

An X-ray analytical apparatus of a wavelength dispersion type having a construction of essential parts improved using a microprobe of ion beam. An ion beam 10 is controlled to be deflected to scan in a fine region of a sample 3, a characteristic X-ray generated by irradiation of the ion beam is subjected spectro-process by a analyzing element 5 set to a predetermined radius of curvature by a curvature changing mechanism, and an X-ray having a specific wavelength selected by the spectro-process is detected by a proportional counter 7. When an angle of the analyzing element is set by a rotational stage to an incident angle of a specific X-ray determined by a detection element on the sample 3, a wide range of wavelength can be subjected to spectro-measured while the sample 3, the analyzing element 5 and the proportional counter 7 remain fixed in position. Since the proportional counter 7 is provided with a lengthy sensing portion, even if an incident position of the X-ray is changed, measurement can be made while a position of a detector remains fixed. Being a position sensitive type detector, incident position information of the X-ray different according to the wavelength can be removed, and the wavelength and strength of the X-ray can be measured while discriminating each X-ray quantum.

X-ray analytical apparatus

A charged particle accelerator capable of accelerating arbitrarily charged particles to an arbitrary energy level and resonating at a low frequency suitable for accelerating heavy ions, including quadruple electrodes which are supplied with high frequency power and disposed in the direction of the center axis of a cylinder-shaped container and a resonant circuit having a capacitor and an inductor for supplying a voltage to the quadruple electrodes. The capacitor is composed of a plurality of metallic plates provided along the center axis at specified intervals in the vicinity of the quadruple electrodes, and a plurality of conductive supports supporting the metallic plates which are directly connected to the container together with the supports and the container form the inductor. Since the metallic plates and the quadruple electrodes are electrically directly connected to each other, an arbitrary resonant frequency can be obtained by adjusting the intervals between the plurality of metallic plates with a position adjusting mechanism. In one embodiment, flat electrodes are protruded from opposite sides of the inner wall of the container and are disposed in parallel to the center axis and close to each other to constitute a capacitor, which makes it possible to have a resonant frequency in a low frequency range. To obtain a large Q value, the surface current resistance is lowered by covering the inner wall of the container and the surfaces of the flat plate electrodes with a superconductive material.

Charged particle accelerator

A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

Converged ion beam apparatus

Growing community of inventors

Kobe, Japan

Yukito Furukawa