Rigaku Corporation

Yukio Sako

Tsutomu Tada

Provided are a signal processing device for X-ray analysis and an adjustment method for a signal processing device for X-ray analysis, which are capable of performing correction of a time constant with high precision and simply and quickly performing adjustment work required for performing the correction. The signal processing device for X-ray analysis includes: a differentiating circuit configured to use a first time constant to convert a signal output from an X-ray detector into an analog differential wave; an AD converter configured to convert the analog differential wave into a digital differential wave; a waveform shaping digital filter configured to use a second time constant to shape the digital differential wave; and a histogram generation unit configured to acquire a feature value of a shaped waveform based on pulse heights in two regions of the shaped waveform, to generate a histogram representing an acquisition frequency for each feature value.

Signal processing device for X-ray analysis and adjustment method for a signal processing device for X-ray analysis

Provided is an X-ray fluorescence spectrometer, which has a simple structure, and is capable of promptly performing high-accuracy analysis. The X-ray fluorescence spectrometer according to the present invention includes: an X-ray source () configured to irradiate a sample () with primary X-rays; a spectroscopic device () configured to disperse secondary X-rays emitted from the sample (); an energy-dispersive detector () configured to measure an intensity of the secondary X-rays; a retracting mechanism () configured to retract the spectroscopic device () from a path of the secondary X-rays; a scanning mechanism (), which is configured to continuously move the detector () between an auxiliary measurement area () for measuring the secondary X-rays in a state where the spectroscopic device () is retracted and a main measurement area () for measuring the dispersed secondary X-rays; a storage device () configured to store, in advance, a ratio between a background intensity measured in the auxiliary measurement area () and a background intensity measured in the main measurement area (); and an arithmetic device () configured to perform correction and quantitative analysis, the correction including subtracting a value, which is obtained by multiplying the background intensity in the auxiliary measurement area () by the ratio, from a measured intensity in the main measurement area ().

X-ray fluorescence spectrometer

An X-ray detection signal processing device () and the like according to the present invention includes: a comparator () configured to output a High signal when a level of a signal from a continuous reset type preamplifier () having an CR circuit () does not exceed a predetermined upper limit value, and output a Low signal when the level of the signal from the preamplifier () exceeds the predetermined upper limit value; and a control section () configured to delay shift of the signal of the comparator () from Low to High by a predetermined time, to perform output to a clock oscillator (), stop oscillation by outputting a Low signal to the clock oscillator (), and thus stop high-speed AD conversion by a high-speed AD converter () and maintain an output value.

X-ray detection signal processing device and X-ray analyzing apparatus using same

The X-ray analyzing apparatus according to the present invention includes, in combination: a first correcting unit (A,B) to output a first gain to cause a pulse height of a target peak which is estimated on the basis of a sum of counting rates obtained in preliminary measurement, to match a predetermined expected pulse height; and a second correcting unit (A,B) to output, in real time through feedback control, a second gain to be added to the first gain in order to cause the pulse height of the target peak detected within a predetermined energy range, to match the expected pulse height, and further includes a feedback control stopping unit (A,B) to appropriately determine presence/absence of an interfering line with respect to the target peak, and to set, when determining that the interfering line exists, the gain to a fixed value including only the first gain.

X-ray analyzing apparatus

An X-ray detection signal processing apparatus of the present invention is such that after a signal from a preamplifier has been converted into a digital signal at a high speed by means of a high speed analog-to-digital converter (), a process for removing influences brought about by a component that has been decayed by a differential time constant in the preamplifier is performed on a digital basis in a digital signal processing block (). An event detecting unit () within the digital signal processing block (), smoothen the signal from the high speed analog-to-digital converter () for a predetermined shaping time with the use of a filter function for high speed shaping, detects as an event information the timing at which the smoothened signal exceeds a predetermined threshold and attains the maximum value, and add such event information to the signal from the high speed analog-to-digital converter ().

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Takatsuki, Japan

Yukio Sako