Ckd Corporation

Tokyo Electron Limited

Yukio Ozawa

Tsuneyuki Okabe

Yasunori Nishimura

Shigeyuki Okura

Takashi Yajima

Minoru Ito

Masayuki Watanabe

Hiroki Doi

Akiko Nakada

Shigenobu Nishida

Tsuneo Niwa

Akiko Kosaka

A rotary valve () includes a valve body () formed with a chamber communication passage () for flowing a main fluid and a vent communication passage () for discharging the main fluid and a cylindrical valve member () rotatably held in the valve body () and formed with a main passage () for flowing the main fluid. The cylindrical valve member () is rotated to switch the connection of the main passage () between the chamber communication passage () and the vent communication passage (). The rotary switching valve () further includes a purge gas passage for passing purge gas in a clearance () between the valve body () and the cylindrical valve member (), the purge gas being supplied to the clearance () to prevent the main fluid from leaking out of the main passage ().

Rotary switching valve

A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.

Gas flow rate verification unit

A solenoid valve capable of handling a corrosive control fluid and developing an increased attraction force. The solenoid valveis adapted such that a fixed core is located in a wound coiland protruding through the lower surface of the coil, a plungerholding a valve sheetis supported by a plate springunder the fixed core, the valve sheetis normally retained in contact with a valve seatby spring force of the plate spring, and the valve sheetis separated from the valve seat against the spring force of the plate springwhen the coilis energized. The fixed core comprises two parts vertically coupled, an upper one of which is a first fixed corelocated in the coilin non-contact with the control fluid, the first fixed core being made of a material having high magnetic permeability, and a lower one of which is a second fixed corefitted, protruding downward, in the coil bobbin to cover the lower end of the coil bobbin, the second fixed core being made of a material having corrosion resistance to the high-corrosive control fluid.

Solenoid valve with 2-part fixed core

Growing community of inventors

Kasugai, Japan

Yukio Ozawa