Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Yukio Mizukami

Keiichi Nakao

Hiroaki Ishida

Takashi Kawai

Toshirou Otobe

Toshiro Otobe

Masaaki Katsumata

Koichi Aburata

The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermomechanical constants. As a result, the fluctuation of sensor characteristic is decreased, and the cost is lowered.

Strain sensor and method for manufacture thereof

A load sensor includes a substrate, a glass layer provided on the substrate, a wiring provided on the glass layer, an adjusting layer provided on the glass layer, and a strain-sensitive resistor element provided on the adjusting layer and connected to the wiring. A thermal expansion coefficient of the adjusting layer is closer to that of the strain-sensitive resistor element than that of the glass layer. In this load sensor, a stress remaining inside the resistor element is reduced, and the change over time of the resistance of the element is accordingly suppressed. Therefore, a single kind of the resistor element can be formed on substrates having respective thermal expansion coefficients, shapes, and thicknesses, thereby providing various load sensors having respective specifications.

Load sensor and its manufacturing method

A strain sensor comprising a metal substrate, a first electrode provided on the metal substrate, a glass layer formed on the first electrode, and a second electrode and a strain detecting resistor provided on the glass layer. In the strain sensor, the insulation resistance between the metal substrate and the second electrode has been raised, and the reliability is high. It can be implemented at low cost.

Method of manufacturing strain sensor

The present invention relates to a load sensor and provides a highly accurate load sensor with multi-layered wiring at low costs. It provides crystallized glass and non-crystalline glass which are best for a load sensor, and combines these to form multi-layered wiring, and further, makes a glass layer of composite type as needed, and reduces uneven printing in printing multiple layers with use of hardening type paste.

Load sensor and method of manufacturing the load sensor, paste used for the method, and method of manufacturing the paste

A strain detector includes an insulating substrate, a power electrode, output electrodes and a ground electrode which are disposed over the insulating substrate, a strain-resistance element provided over the insulating substrate and coupled to the power electrode, the output electrodes and the ground electrode, a protective layer over the strain-resistance element, a frame ground electrode. The insulating substrate includes a stainless steel board, a protective coat on the stainless steel board, and an insulating layer on the protective coat. The frame ground electrode is provided over the stainless steel board and electrically coupled to the stainless board.

Strain detector

A strain sensor includes a metal plate, a first glass layer on the metal plate, a second glass layer provided on the first glass layer and having a color different from that of the first glass layer, an electrode on the second glass layer, a strain-sensitive resistor on the second glass layer, a circuit pattern on the second glass layer for connecting the electrode to the strain-sensitive resistor, and an overcoat glass layer for covering the strain-sensitive resistor and the circuit pattern. The strain sensor allows the layers to be identified while being manufactured, hence being controlled easily in its manufacturing processes.

Strain sensor and production method therefor

Strain sensor and method of producing the same

A strain detector where water does not reach a strain-resistance element and which supplies stable output at all times is provided. In the strain detector, a first protective layer made of glass is disposed to cover an insulating substrate and the strain-resistance element. A second protective layer made of resins or glass for covering the first protective layer, and a thermistor for compensating the resistance of the strain-resistance element are disposed.

Growing community of inventors

Fukui, Japan

Yukio Mizukami