Sumitomo Osaka Cement Co., Ltd.

Sanyo Denki Co., Ltd.

Tokyo Electron Limited

Alps Alpine Co., Ltd.

Yukio Miura

Mamoru Kosakai

Shinichi Maeta

Tomomi Ito

Hiroshi Inazumachi

Keigo Maki

Shinji Himori

Shoichiro Matsuyama

Kazunori Ishimura

Kouji Nakatake

Mitsuaki Shioiri

Hitoshi Kouno

Kei Furuuchi

Atsushi Matsuura

Takashi Sato

Tomoyuki Takahashi

Yasuharu Sasaki

Takeshi Otsuka

Kazunari Takahashi

Yoshiaki Moriya

Keisuke Maeda

Kaoru Oohashi

Takashi Satou

Nobuhiro Hidaka

Hironori Kugimoto

Masaaki Ohashi

Tadashi Aoto

Masaaki Oohashi

Tatsuhiro Tomiyama

Yuuki Kinpara

Takeaki Maehata

Zhang Hong

Jun Arikawa

Yoshihiro Hashimoto

A ceramic joined body () includes: a pair of ceramic plates () that include a conductive material; a conductive layer () and an insulating layer () that are interposed between the pair of ceramic plates (); and a pair of intermediate layers () that are interposed between the pair of ceramic plates () and the conductive layer () and are in contact with the pair of ceramic plates () and the conductive layer ().

Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body

An input device includes an manipulating part, a movable member fixed to the manipulating part and having a rotating shaft, a fixing member configured to rotatably support the rotating shaft so that the movable member is rotatable, a flex sensor disposed on the manipulating part and configured to detect flexing of the manipulating part, a switch disposed on the movable member or the fixing member, pressed by a rotating operation of the movable member, and configured to switch between an on state and an off state when a flexing amount of the manipulating part reaches a predetermined amount, and a signal processor configured to output a control signal, based on a first output signal of the flex sensor, and a second output signal of the switch.

Input device employing a flex sensor and a switch outputting first and second signals

An electrostatic chuck device includes: in order, an electrostatic chuck part having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part in a pattern having gaps; a sheet material; and a base part having a function of cooling the electrostatic chuck part, in which a silicone resin sheet having a layer thickness of 10 &#x3bc;m or more and less than 200 &#x3bc;m and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member.

Electrostatic chuck device including a heating member

An electrostatic chuck device includes: an electrostatic chuck part which incorporates an internal electrode for electrostatic attraction and has a placing surface on which a plate-like sample is placed; a base part which cools the electrostatic chuck part; and an adhesion layer which bonds the electrostatic chuck part and the base part to integrate the parts together, in which a first through-hole is provided in the electrostatic chuck part, a second through-hole that communicates with the first through-hole is provided in the base part, a tubular insulator is fixed in the second through-hole, an annular sealing member is sandwiched between the electrostatic chuck part and a distal end surface of the insulator, wherein the distal end surface is located on the electrostatic chuck part side of the insulator, and a tubular insulating wall member is located at the inner side of the sealing member in the radial direction.

Electrostatic chuck device

Provided is an electrostatic chuck device which includes: an electrostatic chuck section having one main surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a first adhesion layer which contains spacers and a silicone adhesive and in which a layer thickness D is in a range of 3 to 25 &#x3bc;m and a ratio (&#x3d5;/D) between the layer thickness D and an average particle diameter &#x3d5;of the spacers is in a range of 0.1 to 1.0; a plurality of heating members bonded to the surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having a gap with respect to one another by the first adhesion layer; a second adhesion layer which contains a silicone adhesive; and a base section having a function of cooling the electrostatic chuck section.

An electrostatic chuck device includes: an electrostatic chuck section having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having gaps; a sheet material; and a base section having a function of cooling the electrostatic chuck section, in this order, in which each of the gaps of the pattern is filled with an inorganic filler composition which includes an inorganic filler and an adhesive.

An aspect of the present invention has an object to provide an electrostatic chuck device which is provided with a plurality of divided heaters and in which uniform temperature control of a zone which is heated by each heater can be performed with a simple configuration. An electrostatic chuck device according to an aspect of the present invention includes: an electrostatic chuck part which has a mounting surface on one principal surface thereof to mount a plate-shaped sample and has an electrode for electrostatic attraction; a temperature controlling base part which is provided at a side opposite to the mounting surface of the electrostatic chuck part and is configured to cool the electrostatic chuck part; a high frequency generating electrode which is provided in a layer between the electrostatic chuck part and the temperature controlling base part; a high frequency power source which is connected to the high frequency generating electrode; a first heater element which is configured with a plurality of main heaters which are provided in a layer between the high frequency generating electrode and the temperature controlling base part; and a guard electrode which is provided in a layer between the high frequency generating electrode and the first heater element.

An electrostatic chuck deviceincludes: an electrostatic chuck sectionhaving one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a first adhesion layer; a sheet material; a second adhesion layer; and a temperature adjusting base sectionwhich adjusts a temperature of the electrostatic chuck sectionto a desired temperature, in this order, in which the first adhesion layerincludes a joining layerhaving a layer thickness in a range of 1 nm to 500 nm, and a silicone adhesive layerhaving a thickness in a range of 2 &#x3bc;m to 30 &#x3bc;m, and the second adhesion layerincludes a joining layerhaving a layer thickness in a range of 1 nm to 500 nm, and a silicone adhesive layerhaving a thickness in a range of 2 &#x3bc;m to 30 &#x3bc;m.

An electrostatic chuck device according to the present invention includes: an electrostatic chuck portion having a placement surface on which a plate-like sample is placed; a base portion for temperature adjustment disposed in opposition to the side of the electrostatic chuck portion on the opposite side from the placement surface; a bonding portion for bonding the electrostatic chuck portion and the base portion for temperature adjustment together; and an annular focus ring surrounding the periphery of the placement surface, in which the volume of a space surrounded by the electrostatic chuck portion, the focus ring, the bonding portion, and a dam portion of the base portion for temperature adjustment is greater than the amount of volume expansion of the bonding portion at the working temperature.

Electrical insulation properties of winding start ends or terminal ends of insulating coating electric wires of coils wound around polar teeth of a stator core are improved, and creeping and spatial distances for electrical insulation are secured. Wall portions which project toward an interior of a radial direction or an exterior of an axial direction of a stator core and which have electrical insulation properties are formed in an inner peripheral portion of the stator core of a motor, groove portions are formed in the wall portions and winding start ends or terminal ends of insulating coating electric wires of coils are arranged in the groove portions.

Wiring structure of stator coil

An electrostatic chuck device is provided in which there is no concern that a plate-shaped sample may be deformed when adsorbing the plate-shaped sample or when detaching the plate-shaped sample, the temperature of the plate-shaped sample is uniformized, and particles are not easily produced. In an electrostatic chuck deviceprovided with an electrostatic chuck sectionwhich has a placement plate, an upper surfaceof which is a placement surface on which a plate-shaped sample W such as a semiconductor wafer is placed, a support plateintegrated with the placement plate, and an internal electrode for electrostatic adsorptionand an insulating material layerwhich are provided between the placement plateand the support plate, an annular projection portionis provided at a peripheral border portion on the upper surface, a plurality of projection portionshaving the same height as the height of the annular projection portionare provided in an area surrounded by the annular projection portionof the upper surface, and an upper end portion of the annular projection portionand an upper end portion of each of the plurality of projection portionsare located on a concave surfacewith a central portion of the upper surfaceas a basal plane.

An electrostatic chuck device includes an electrostatic chuck part that has an upper surface as a placement surface for placing a plate-shaped sample and has an internal electrode for electrostatic attraction built therein; and a cooling base part that cools the electrostatic chuck part. The electrostatic chuck part and the cooling base part are integrally adhered to each other via an adhesive layer. An insulator having a double pipe structure including an insulator and an insulator provided coaxially with an outer peripheral portion of the insulator is provided in a cooling gas hole, formed in the electrostatic chuck part and the cooling base part, so as to cover an exposed surface of the adhesive layer on the cooling gas hole side.

An electrostatic chuck device () according to the invention includes an electrostatic chuck section () that has a principal surface as a placement surface on which a plate-shaped sample is placed, and is made to have an internal electrode for electrostatic adsorption built-in, and a cooling plate section () that cools the electrostatic chuck section (), wherein a heating member () is bonded to a principal surface on the opposite side to the placement surface of the electrostatic chuck section () through a first adhesive material layer (), and the electrostatic chuck section () and the heating member () are bonded to and integrated with the cooling plate section () through an acrylic adhesive layer () having flexibility and insulation properties.

The electrostatic chucking deviceof the invention includes an electrostatic chucking portionwhich includes a plate-like body, a top surfaceof which is used as a mounting surface that mounts a plate-like specimen W, an electrostatic adsorption electrodeprovided in the plate-like bodyand a power-feeding terminalthat applies a direct-current voltage to the electrostatic adsorption electrode; and a base portionthat supports the electrostatic chucking portion, in which the plate-like bodyis a corrosion-resistant ceramic, a circular insulation memberis provided in a circumferential edge portion between the electrostatic chucking portionand the base portion, and a heat radiation plateis provided on the top surfaceof the base portion

Electrostatic chucking device

An electrostatic chuck device includes an electrostatic chuck section (), which has a principal surface that is a mounting surface on which a plate-like sample (W) is placed, and has an internal electrode for electrostatic adsorption () incorporated in the section, and a temperature adjustment base section () which adjusts the temperature of the electrostatic chuck section (); wherein a part or all of a surface of the temperature adjustment base section () is covered by a sheet-like or film-like insulating material () wherein the surface faces the side where the electrostatic chuck section is located; a thin plate-like heater element () is bonded on the insulating material (); and the electrostatic chuck section () and the temperature adjustment base section () are integrated with each other via an organic insulating adhesive layer () formed by curing a liquid adhesive.

Growing community of inventors

Tokyo, Japan

Yukio Miura