Fuji Photo Optical Co., Ltd.

Yukio Kondou

Masane Suzuki

Shigeo Mizukawa

Shigenori Ohi

Hiroshi Shibamoto

Kenichi Noguchi

A laser interferometer for inspecting the surface condition of a specimen by irradiating the specimen on a specimen support mechanism with a laser beam projected thereto through a reference plate, and observing the interference fringe produced by interference between reflected light from a reference surface of the reference plate and a surface of the specimen under inspection, the laser interferometer includes: an interferometer housing accommodating therein an optical laser beam guide member and an optical interference fringe imaging member, and is provided with a laser beam guide portion in a wall portion thereof; a laser tube mount member of a cylindrical form projected on the outer side of the housing and positioned in such a manner so as to circumvent the laser guide portion; and a laser tube detachably fitted in the laser tube mount member.

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Omiya, Japan

Yukio Kondou