Youtec Co., Ltd.

Advanced Material Technologies, Inc.

Yukinori Tani

Takeshi Kijima

Yuuji Honda

An aspect of the present invention relates to ferroelectric ceramics including a stacked film formed on a Si substrate, a Pt film formed on the stacked film, a SrTiOfilm formed on the Pt film, and a PZT film formed on the SrTiO, wherein the stacked film is formed by repeating sequentially N times a first ZrOfilm and a YOfilm, and a second ZrOfilm is formed on the film formed repeatedly N times, the N being an integer of 1 or more. It is preferable that a ratio of Y/(Zr+Y) of the stacked film is 30% or less.

Ferroelectric ceramics and method for manufacturing the same

To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention is a piezoelectric film having a crystal oriented in the c-axis direction and a crystal oriented in the a-axis direction, in which, when denoting the amount of a (004) component of the crystal oriented in the c-axis direction by C and denoting the amount of a (400) component of the crystal oriented in the a-axis direction by A, the piezoelectric film satisfies a formula 1 below./()&#x2267;0.1&#x2003;&#x2003;formula 1

Growing community of inventors

Chiba, Japan

Yukinori Tani