Hitachi, Ltd.

Renesas Technology Corp.

Yukino Ishii

Hidenori Sato

Tsuyoshi Fujiwara

Katsuhiko Ichinose

Kiyomi Katsuyama

Kiyohiko Sato

Daichi Matsumoto

Ryohei Maeno

Tomoko Jinbo

Akira Otaguro

The orientation polarization (positive and negative) of the Si&#x2014;N bonds and the Si&#x2014;O bonds is canceled, thereby enabling to minimize the polarization in a capacitive insulating film. As a result, a silicon oxynitride film with a small voltage secondary coefficient is formed, and is applied as a capacitive insulating film for use in a MIM capacitor. Specifically, the refractive index 'n' of the silicon oxynitride film satisfies 1.47&#x2266;n&#x2266;1.53, for light with a wavelength of 633 nm.

Transistor with MIM (Metal-Insulator-Metal) capacitor

A CVD device () used for depositing a silicon nitride has a structure in which a hot wall furnace () for thermally degrading a source gas and a chamber () for forming a film over a surface of a wafer () are separated from each other. The hot wall furnace () for thermally degrading the source gas is provided above the chamber (), and a heater () capable of setting the inside of the furnace at a high temperature atmosphere of approximately 1200&#xb0; C. is provided at the outer periphery thereof. The source gas, supplied to the hot wall furnace () through pipes () and (), is thermally degraded in this furnace in advance, and degraded components thereof are supplied on a stage () of the chamber () to form a film on the surface of the wafer ().

Method of manufacturing a semiconductor integrated circuit device

Growing community of inventors

Hamura, Japan

Yukino Ishii