Ngk Insulators, Inc.

Yukimasa Mori

Yuki Bessho

Hiromichi Kobayashi

Naohito Yamada

Yuji Katsuda

Shinji Fujisaki

Sumiko Horisaka

Michio Takahashi

Aya Sato

A gas sensor including a pump electrode and a method for manufacturing a conductive paste for forming the pump electrode. When the pump electrode constituting an electrochemical pump cell for adjusting an oxygen partial pressure inside a gas sensor to measure a concentration of a gas component in a measurement gas by a current-limiting method is formed of a cermet of a noble metal and an oxide having oxygen ion conductivity, the noble metal contains a first noble metal having a catalytic activity, and a second noble metal having a catalytic activity suppressing ability to suppress the catalytic activity of the first noble metal with respect to an oxide gas except for oxygen, and an abundance ratio of the second noble metal with respect to the first noble metal in a particle surface of the first noble metal existing in the pump electrode is to be 0.01 to 0.3.

Pumping electrode of gas sensor, method of manufacturing conductive paste, and gas sensor

An aluminum nitride sintered body has characteristics such that an amount of total metal elements other than aluminum is smaller than 100 ppm, and a volume resistivity at room temperature is greater than 1.0&times;10,&OHgr;&middot;cm and is smaller than 1.0&times;10,&OHgr;&middot;cm. A metal including member has such a construction that a metal member is embedded in the aluminum nitride sintered body mentioned above. An electrostatic chuck is made by the metal including member mentioned above. In the metal including member mentioned above in which the metal member is embedded in the aluminum nitride sintered body mentioned above, a volume resistivity thereof can be controlled without adding a low resistance material in aluminum nitride.

Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member

In AlN crystal grains constituting a sintered body, is contained: 150 ppm-0.5 wt. %, preferably at most 0.1 wt.%, of at least one rare earth element (as oxide thereof); at most 900 ppm, preferably at most 500 ppm of at least one metal impurity except rare earth elements; and preferably at least 0.5 wt. % of oxygen measured by an electron probe X-ray microanalyzer. The grains have an average grain diameter of preferably at least 3.0 .mu.m and show a main peak in the wavelength range of 350-370 nm of spectrum obtained by a cathode luminescence method. The sintered body composed of AlN crystal grains has a volume resistivity at room temperature of at most 1.0.times.10.sup.12 .OMEGA..multidot.cm.

Aluminum nitride sintered body, metal embedded article, electronic

An aluminum nitride sintered body has characteristics such that an amount of total metal elements other than aluminum is smaller than 100 ppm, and a volume resistivity at room temperature is greater than 1.0.times.10.sup.9 .OMEGA..multidot.cm and is smaller than 1.0.times.10.sup.13 .OMEGA..multidot.cm. A metal including member has such a construction that a metal member is embedded in the aluminum nitride sintered body mentioned above. An electrostatic chuck is made by the metal including member mentioned above. In the metal including member mentioned above in which the metal member is embedded in the aluminum nitride sintered body mentioned above, a volume resistivity thereof can be controlled without adding a low resistance material in aluminum nitride.

Aluminum nitride sintered body, metal including member, electrostatic

An aluminum nitride sintered body is characterized by having a g-value of an unpaired electron in a spectrum of an electron spin resonance being not less than 2.0010. The aluminum nitride sintered body is produced by sintering a raw material composed of powdery aluminum nitride at a temperature of not less than 1730.degree. C. to not more than 1920.degree. under a pressure of not less than 80 kg/cm.sup.2.

Growing community of inventors

Nagoya, Japan

Yukimasa Mori