Kyocera Crystal Device Corporation

Yukiko Furukata

Kotaro Wakabayashi

Shingo Ishiuchi

Shiori Miyazaki

Akinori Ito

A method uses a first mask which is comprised of an X-shaped arm, a pattern portion which is a crossed part of the X-shape and is formed in a polygon shape or a circle shape, and a frame member which is connected to the pattern portion, and a second mask which is comprised of a cross-shaped arm, a pattern portion which is a crossed part of the cross shape and is formed in a polygon shape or a circle shape, and a frame member which is connected to the pattern portion; and includes a first transparent member wafer metal film-forming step of superimposing the first mask on one transparent member wafer between two transparent member wafers and forming a metal film between the pattern portions and the frame members, a second transparent member wafer metal film-forming step of superimposing the second mask on the other transparent member wafer.

Method of manufacturing optical device

An etalon has a pair of transparent components; a ring-shaped piezoelectric member which is provided between the pair of transparent components, which is bonded to the pair of transparent components, and which is provided with metal films on the surfaces which face the transparent component sides; and the external connecting terminals which are provided on the transparent components and which are connected to the metal films.

Growing community of inventors

Higashine, Japan

Yukiko Furukata