Ngk Insulators, Inc.

Nippon Hoso' Kyokai

Nck Insulators, Ltd.

Yukihisa Osugi

Takayuki Kikuchi

Takao Soma

Shosaku Gouji

Yoshinari Kozuka

Tomoyoshi Tai

Shoichiro Yamaguchi

Shuhei Toyoda

Yasuharu Kuno

Takao Ohnishi

Masashi Fukuyama

Masahiro Sakai

Akira Hamajima

Kuniharu Takizawa

Yoshizumi Nakasuji

Hiroaki Abe

Tadasu Ishikawa

Shoji Tange

Hiroshi Kikuchi

Miyuki Muto

Ryoichi Hata

Yuji Fujiwara

An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.

Piezoelectric thin film device having an additional film outside an excitation region

There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness. A film bulk acoustic resonator has a configuration where an adhesive layer, a lower electrode, a piezoelectric thin film, and an upper electrode are laminated in this order on a support substrate. A drive section of the upper electrode and a drive section of the lower electrode are opposed to each other with the piezoelectric thin film interposed therebetween. The respective drive section has a slender two-dimensional shape, with magnitude in its longitudinal direction being not less than twice, more desirably four times, and further desirably ten times, as large as magnitude in its widthwise direction.

Piezoelectric thin film device having a drive section with a weighted portion

A vibrator for generating a signal for measuring a physical quantity using a vibrator is provided, including at least one bending vibration arm vibrating in bending mode along a specified plane and having a first end, an opposed second end, and first and second main faces that are substantially parallel with each other. A base portion is provided at the first provided at the first end of the bending vibration arm, a weight portion is provided at the second end of the bending vibration arm, and grooves are formed on the first and second main faces. The vibrator further includes driving means for exciting a driving vibration in the vibrator, and detecting means provided on one of the bending vibration arms for detecting an output signal based on detection vibrations induced in the vibrator responsive to the physical quantity to be measured.

Vibrators and vibratory gyroscopes

A vibrator for a vibratory gyroscope including a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part. The base part and bending-vibration piece are formed to extend substantially in a specified plane. At the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, wherein the resonant arms project from the fixing part. With this arrangement, it is possible to detect a turning angular rate with high accuracy.

Vibrator, vibratory gyroscope, and vibration adjusting method

A vibratory gyroscope for detecting a turning angular rate of rotation applied to a vibrator in a predetermined temperature range is disclosed. The vibratory gyroscope has a vibrator, a supporting member for supporting the vibrator and an adhesive portion made of an adhesive provided between the supporting member and the vibrator for bonding the vibrator to the supporting member. The vibratory gyroscope detects a turning angular rate based on a detecting vibration excited in the vibrator according to rotation when a driving vibration is excited in the vibrator. The adhesive has a tan &dgr; not higher than 0.1 within the temperature range.

Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope

A vibratory gyroscope for detecting a turning angular rate in a turning system is provided. The gyroscope comprises a vibrator, an exciting means for exciting driving vibration in the vibrator, and a detecting means for detecting vibration induced in the vibrator. The vibrator comprises a plurality of vibration systems A, B, A and B, which are formed within a specified plane intersecting the turning axis Z. Vibration systems comprises first vibration systems A and B whose vibrations include radial vibration components, in which the center of gravity of first vibration system vibrates in a radial direction in the specified plane with respect to the center of gravity GO of the vibrator. The vibration systems also comprises second vibration systems A and B whose vibrations include circumferential vibration components, in which the center of gravity of vibration of the second vibration system vibrates in the specified plane along a circle with the center of gravity GO as its center.

Vibrators, vibratory gyroscopes, devices for measuring a linear acceleration and a method of measuring a turning angular rate

A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Vibrator, vibratory gyroscope, and vibrator adjusting method

A vibratory gyroscope for detecting a turning angular rate in a turning system is provided. The gyroscope comprises a vibrator, an exciting means for exciting driving vibration in the vibrator, and a detecting means for detecting vibration induced in the vibrator. The vibrator comprises a plurality of vibration systems,A,,B,,A and,B, which are formed within a specified plane intersecting the turning axis Z. Vibration systems comprises first vibration systems,A and,B whose vibrations include radial vibration components, in which the center of gravity of first vibration system vibrates in a radial direction in the specified plane with respect to the center of gravity GO of the vibrator. The vibration systems also comprises second vibration systems,A and,B whose vibrations include circumferential vibration components, in which the center of gravity of vibration of the second vibration system vibrates in the specified plane along a circle with the center of gravity GO as its center.

A vibrator including a loop-shaped vibration system,, another vibration system,A,,A and,B vibrating independently from the system,, and connecting portions,A and,B. Exciting means for exciting driving vibration in the vibrator is provided in one of the loop-shaped vibration system and another vibration system, and detecting means for detecting detection vibration induced in the vibrator, when it is turned, is provided in the other of the systems, to provide a vibratory gyroscope.

Vibrators vibratory gyroscopes a method of detecting a turning angular rate and a linear accelerometer

A vibratory gyroscope for detecting a turning angular rate of rotation applied to a vibrator, which vibratory gyroscope has the vibrator provided with a plurality of vibration pieces and a base part having the plurality of vibration pieces connected with it and is composed so as to obtain the turning angular rate on the basis of a detecting vibration excited in the vibrator according to the turning angular rate when giving a driving vibration to at least one of the vibration pieces, and makes the vibrator being supported in a domain where the detecting vibration is smallest in said vibrator, said domain being in the vicinity of the center of gravity of the vibrator. It is preferable that the vibrator is supported in the vicinity of the center of gravity of a driving vibration of the vibrator and a supporting hole is provided in a domain where the detecting vibration is smallest in a state where no supporting hole is provided in the vibrator and the vibrator is supported on or near the inner wall face of this supporting hole.

An optical transmission member-fixed assembly including a substrate with a receipt groove in which a core wire of an optical transmission member is received, a lid integrated with the substrate, while between the substrate and the lid is provided a receipt space in which at least a covering of the optical transmission member is received, a dimension of the receipt space being greater than that of the receipt groove when viewed in a width direction, wherein an adhesive is filled around the core wire inside the receipt groove for fixing the core wire there, an adhesive is filled around the optical transmission member within the receipt space for fixing the optical transmission member there, a thickness of the adhesive filled around the optical transmission member inside a boundary space zone between the receipt space and the receipt groove is continuously reduced as a location of the boundary space zone is at least near and goes to an opening of the receipt groove at an end opposed to the receipt space.

Optical transmission member-fixed assembly

Object rays and reference rays are projected to record interference fringes on a volume hologram comprising a material exhibiting a photoinducing refractive effect, and a reconstructed image is obtained by illuminating the volume hologram with reconstruction rays. When the wavelength .lambda..sub.1 of the object rays is longer than the wavelength .lambda..sub.2 of the reconstruction rays, the reconstruction is conducted by illuminating the volume hologram with a convergent spherical wave and when the wavelength .lambda..sub.1 of the object rays is shorter than the wavelength .lambda..sub.2 of the reconstruction rays, the reconstruction is conducted by illuminating the volume hologram with a diffused spherical wave.

Method and an apparatus for recording and reproducing using a hologram,

A vibrator comprising a base part at least one of whose ends is fixed, a first leg extending in a direction crossing this base part, a second leg extending in a direction crossing the base part and being opposed to said first leg with respect to said base part, a first bending-vibration piece extending in a direction crossing said first leg, a second bending-vibration piece extending in a direction crossing the first leg and being opposite to said first bending-vibration piece with respect to said first leg, a third bending-vibration piece extending in a direction crossing said second leg, and a fourth bending-vibration piece extending in a direction crossing the second leg and being opposite to said third bending-vibration piece with respect to said second leg.

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Nagoya, Japan

Yukihisa Osugi