Panasonic Corporation

Yukihiro Yamashita

Keita Takahashi

A non-volatile semiconductor memory device includes a plurality of memory cell regions including a plurality of bit lines, a plurality of word lines intersecting the plurality of bit lines, and a first insulating film formed in a region between any two adjacent bit lines, a bit line contact region including bit line contacts connected to the plurality of bit lines, a first UV light shielding film covering at least a portion of the semiconductor substrate in the bit line contact region, an interlayer insulating film, and a second UV light shielding film covering the plurality of memory cell regions. The first UV light shielding film effectively reduces or blocks UV light generated during a fabrication step.

Non-volatile semiconductor memory device

The protection element of the present invention is constructed of a MOS capacitor composed of a semiconductor substrate, an insulating film formed on the semiconductor substrate and a word line formed on the insulating film. A well region having a conductivity type opposite to that of the semiconductor substrate is formed in a portion of the semiconductor substrate constituting the MOS capacitor. If charge exceeding the breakdown voltage of the insulating film constituting the MOS capacitor is induced in the word line, the induced charge is released into either the semiconductor substrate or the well region depending on whether the induced charge is positive or negative.

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Niigata, Japan

Yukihiro Yamashita