Epson Toyocom Corporation

Yukihiro Tonegawa

Akitoshi Hara

Katsuo Ishikawa

A piezoelectric resonator includes a piezoelectric resonator element having a resonating arm and a metal film that is formed on the resonating arm; a package including a bottom part on which the piezoelectric resonator element is fixed and a frame wall that surrounds the bottom part, and having an opening above the bottom part; and a lid including a frame in which a through hole is provided and an optically transparent part that has an upper face and a lower face of the frame and is disposed at the through hole, the through hole penetrating a front face and a back face, the lower face of the optically transparent part being disposed so as to oppose the metal film, and the lid closing the opening of the package such that the lid overlaps with the bottom part and the frame wall, the through hole having a curved inner wall face whose curved face is coupled with at least one of the front face and the back face at least one opening edge of the front face and the back face and a vertical inner wall face that is provided vertical to the front face and the back face and in a part of a thickness direction of the frame, and the optically transparent part being provided so as to contact closely with at least a part of the vertical inner wall face and at least a part of the curved inner wall face.

Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator

A piezoelectric resonator includes a piezoelectric resonator element having a base portion and a resonating arm extending from the base portion, a package including a bottom to which the piezoelectric resonator element is fixed and a frame wall that surrounds the bottom and having an opening above the bottom, and a lid for closing the opening of the package. In this piezoelectric resonator, the lid includes a main body having a through-hole formed therein, a flange formed to surround a periphery of the main body and to be thinner than the main body, and an optically transparent member located in the through-hole. The flange has a joining portion with an upper end surface of the frame wall, and the main body projects in a direction from the flange to the bottom in a thickness direction. Also, the through-hole is at a position displaced in a first direction approaching a first end of the main body from a center of the main body. Also, the flange is joined with the frame wall such that a clearance between the first end and the joining portion of the flange nearest to the first end is larger than a clearance between a second end in a second direction opposite to the first direction of the main body and the joining portion of the flange nearest to the second end.

Growing community of inventors

Minowa, Japan

Yukihiro Tonegawa