Dainippon Screen Mfg. Co., Ltd.

Yukihiro Takamura

Hideki Adachi

Masahiro Mimasaka

Sanzo Moriwaki

Mikio Masuichi

Akiko Tanaka

In a thermal type flowmeter, a heating/heat-sensitive coilwhich is shaped as a coil is fit close into an approximately central portion of a duct pipe. A flow rate computing circuitsupplies electric power to the heating/heat-sensitive coilin accordance with an instruction received from a control portion, the heating/heat-sensitive coildevelops heat, and the heat developing at the heating/heat-sensitive coilheats up a hole transporting materialwhich flows through the duct pipe. Further, the flow rate computing circuitwhich is electrically connected with the heating/heat-sensitive coildetects a difference between an upstream-side temperature and a downstream-side temperature, and calculates the flow rate (mass flow rate) of the hole transporting materialbased on this temperature difference, the amount of heating, physical properties data such as the specific heat and the heat capacity regarding the hole transporting material

Substrate processing apparatus and thermal type flowmeter suitable to the same

A developing solution dispensing nozzle starts scanning at a scanning start position P1. After the developing solution dispensing nozzle reaches an edge of a substrate, the developing solution dispensing nozzle scans over the substrate while uniformly dispensing a developing solution to a surface of the substrate. The developing solution dispensing nozzle thereafter moves off the substrate from the other edge of the substrate. To uniformly supply the developing solution to a substrate, where a flow rate of the developing solution is set constant, a scanning speed is set large during an initial scanning section over a substrate, and the scanning speed is set slow during the remaining section. Meanwhile, where the scanning speed of the developing solution dispensing nozzle is set constant, the flow rate of the developing solution is gradually increased during the initial scanning section, and the flow rate is set constant during the remaining section.

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Kyoto, Japan

Yukihiro Takamura