Seiko Instruments Inc

Sii Nanotechnology Inc.

Yukihiro Sato

Masatoshi Yasutake

Ryuichi Matsuzaki

Nobuhiro Shimizu

Takeshi Umemoto

Akihiko Honma

A probe scanning device has a first tubular member extending in a z direction. A second tubular member has a rear end portion extending into the first tubular member to define a space between an inner peripheral surface portion of the first tubular member and an outer peripheral surface portion of the second tubular member. A probe tip is mounted on a front end portion of the second tubular member. A viscous material is disposed in the space between the first tubular member and the second tubular member. A moving mechanism reciprocally moves the first tubular member in an xy direction, and a voice coil motor drives the second tubular member towards the first tubular member in the z direction. A drive mechanism has a coarse adjustment mode for coarsely moving the probe tip toward a surface of a sample and a measurement mode for fine movement of the probe tip in the z direction to maintain a given relationship between relative positions of the probe tip and the sample surface after coarse movement. A connecting mechanism selectively integrally connects the first tubular member and the second tubular member to one another.

Probe scanning device

A scanning probe instrument which can calibrate measured values and permits accurate length measurements regardless of a magnification factor. A scan signal generator produces a fine movement signal that is amplified or attenuated by an attenuator. Magnification data items for various magnification modes are stored in a dimensional relation storing portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal from the dimensional relation storing portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal at a magnification corresponding to the magnification data supplied via the magnification selector portion.

Scanning probe instrument

A scanning probe microscope comprises a cantilever having a probe at an end portion thereof. A scanning signal generating device generates a main scanning signal and a sub-scanning signal. A main scanning device scans the probe along a main scanning direction over a sample surface in accordance with the main scanning signal. A sub-scanning device scans the probe along a sub-scanning direction over the sample surface in accordance with the sub-scanning signal. A Z-direction fine moving device moves the probe in a fine movement in the Z direction with respect to the sample surface maintains the probe at a predetermined distance from the sample surface. At least two of the main scanning device, the sub-scanning device, and the Z-direction fine moving device comprise voice coil motors. Each of the voice coil motors has a stator having a groove and a movable member extending into the groove for undergoing movement therein. A viscous fluid is disposed in the groove of the stator of each voice coil motor for attenuating Q of a resonant vibration thereof.

Scanning probe microscope

A cantilever unit comprises a substrate and a self-detecting type cantilever attached to the substrate. The self-detecting type cantilever has a cantilever portion extending from the substrate and a probe tip depending from the cantilever portion and detects a deflection of the cantilever portion when, for example, the probe tip is scanned over a surface of a sample. A visual identification portion of the cantilever unit permits the cantilever unit to be visually distinguished from other cantilever units.

Cantilever unit and scanning probe microscope utilizing the cantilever unit

A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for moving the probe in each of three directions x, y and z upon activation of the voice coil motors. A probe supporting mechanism is mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y.

Growing community of inventors

Chiba, Japan

Yukihiro Sato