Yamaguchi University

Marunaka Co., Ltd.

Yukihiro Ishikawa

Setsuo Yamamoto

Hiroki Kurisu

Naoki Takada

Mitsugu Nakagawa

Katsushi Tsuge

Provided are a leakage inspection apparatus and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber. The leakage inspection apparatus includes liquid supplying and pressurizing meansfor supplying a probe liquid to the inside of the tested-body chamberand pressurizing the probe liquid to a high pressure 0.1 MPa or more, vacuum evacuation means--and a quadrupole mass spectrometer. The tested bodyis evacuated, the probe liquid is supplied to the inside of the tested body and pressurized to 0.1 MPa or more and the concentration of a probe medium leaked from the tested body and evaporated in a vacuum is measured by the quadrupole mass spectrometer, thereby measuring the flow rate of leakage from the tested body. This makes it possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously possible to perform a pressure tightness inspection at an atmospheric pressure of 0.1 MPa or more, especially at a high pressure ranging from 1 MPa to 1 GPa.

Growing community of inventors

Obu, Japan

Yukihiro Ishikawa