Other

Yukihiro Hirai

Chihiro Ueda

Kouichi Yoshida

A spiral contactor for establishing an electric connection with a semiconductor device or an electronic part including a solder ball includes a spiral probe having a spiral shape, as viewed from the top. The spiral probe is embedded in an insulating substrate in a manner that permits resilient deformation thereof in accordance with a shape of the solder ball. An edge of the spiral probe is pressed to engage the solder ball, and slides along a periphery of the solder ball, thereby cutting an oxide membrane thereon. The spiral contactor may be manufactured by combination of the photolithography technique and the plating process, and used for a semiconductor inspecting apparatus and an electronic part.

Method for manufacturing spiral contactor

A spiral contactor for establishing an electric connection with a semiconductor device or an electronic part including a solder ball includes a spiral probe having a spiral shape as viewed from a top thereof. The spiral probe is embedded in an insulating substrate in a manner that permits resilient deformation thereof in accordance with a shape of the solder ball, and an edge of the spiral probe is pressed to engage into the solder ball and slides along a periphery of the solder ball, thereby cutting oxide membrane thereon. The spiral contactor may be manufactured by combination of the photolithography technique and the plating process, and used for a semiconductor inspecting apparatus and an electronic part.

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Koganei-shi, Tokyo, Japan

Yukihiro Hirai