Kasuga Denki, Inc.

Yukihira Sakurai

Satoru Ogiso

Takao Morishita

Satoshi Sugimura

Junya Yoshida

Takehiko Ueda

A discharge electrode E in an electrode chamber C comprises a plurality of electrode members. The electrode membersare disposed facing each other by having a supporting membertherebetween, a gap is formed between the facing portions of the electrode members, and by having the gap as a gas passageway, the gas passageway is opened in the leading end of the discharge electrode. A replacement gas having been supplied from a manifold pipeis supplied to the gas passagewayvia an orifice.

Surface modifying device

Surface modification device forms a discharge area Ebetween a discharge electrodeand a counter electrode, supplies substitution gas to the discharge area E, and modifies the surface of the base material to be processed. The surface modification device comprises; a slit-shaped substitution gas passage; and cover membersthat form curtain passagesin spaces facing the discharge electrode. While the substitution gas is being supplied to the discharge area E, gas injected from the curtain passagesprevent the inflow of an entrained flow a and the outflows b, bof the substitution gas, thereby maintaining the concentration of substitution gas inside the discharge area E

Surface modification device

A controlling apparatus for a high frequency high voltage power source is disclosed which eliminates a switching loss of a high frequency invertor and allows adjustment of the output power to be performed continuously and accurately over a wide range. A resonance current of a resonance circuit of the high frequency high voltage power source is detected by current detection means, and a phase locked loop circuit locks itself with a frequency with which it coincides in phase with the resonance current to produce a synchronized pulse signal. From the pulse signal, a signal having a zero voltage outputting period of a preset duration is formed by a pulse density modulation circuit to change the pattern of a gate signal for switching semiconductor elements of a high frequency invertor to adjust the output power. An input voltage before a zero voltage outputting period is entered is stored into voltage storage means such as a sample and hold circuit so that the phase locked loop circuit may continue to lock with the same frequency also during the zero voltage outputting period.

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Kawasaki, Japan

Yukihira Sakurai