Canon Kabushiki Kaisha

Yuki Toriumi

Kazunori Suzuki

Hiroo Katsuta

Mikichi Ban

Kazuhiko Hara

A device, usable with an object having a layer, for measuring the thickness of the layer, includes a system for irradiating the object with light while changing its wavelength, the irradiating system having a light-emitting portion disposed opposed to the surface of the object, a photodetecting unit for detecting the light from the object irradiated by the irradiating system, the photodetecting unit having a light-receiving portion disposed opposed to the object, a system for detecting the thickness of the layer of the object on the basis of the detection by the photo-detecting unit, and a setting mechanism for positioning the object, relative to the light-emitting portion and the light-receiving portion, at a distance that substantially corresponds to an extremum of the quantity of light which is to be received by the light-receiving portion and which is variable with the positional relation of the object with the light-emitting portion and the light-receiving portion.

Method and apparatus for measuring the thickness of a thin film using

A method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.

Aligning method

A press apparatus for planar members is provided with a first transfer table for transferring a first planar member to a press position, a second transfer table for transferring a second planar member to the press position substantially simultaneously with the first transfer table, a device for aligning the first and second planar members, a device for effecting the parallel feeding of the first and second planar members, and a device for pressing the first and second planar members with a predetermined pressure.

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Tokyo, Japan

Yuki Toriumi