Fasford Technology Co., Ltd.

Yuki Nakui

Hiroshi Maki

Tatsuyuki Okubo

Tsuyoshi Yokomori

Naoki Okamoto

Akira Saito

A semiconductor manufacturing apparatus includes a thrust-up unit having a plurality of blocks in contact with a dicing tape, a head having a collet absorbing the die and capable of being moved up and down, and a control section controlling the operation of the thrust-up unit and the head. The thrust-up unit can operate each of the plurality of blocks independently. The control section configures the thrust-up sequences of the plurality of blocks in a plurality of steps, and controls the operation of the plurality of blocks on the basis of a time chart recipe capable of setting the height and the speed of the plurality of blocks for each block and in each step.

Growing community of inventors

Minami-Alps, Japan

Yuki Nakui