Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,317 patents)
1 patent:
1. 10584414 - Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas