Hamamatsu-photonics K.k.

Yuki Kabeya

Toshiyuki Kawashima

Takashi Sekine

Yoshinori Kato

Takashi Kurita

Norio Kurita

Takeshi Watari

Yoshio Mizuta

A laser processing apparatus includes a light source which outputs a laser light, and a waveform control unit which controls a pulse waveform of the laser light irradiating the workpiece, in which the pulse waveform of the laser light controlled by the waveform control unit includes a main pulse and a foot pulse temporally preceding the main pulse, and a peak intensity of the foot pulse is smaller than a peak intensity of the main pulse, and a peak position of the main pulse is positioned in a retention time period of plasma generated due to an incidence of the foot pulse on the workpiece.

Laser processing apparatus and laser processing method

A laser device includes a laser medium for amplifying seed light, a first optical system for outputting excitation light for exciting the laser medium and causing the excitation light to be incident on the laser medium and input to an excitation region of the laser medium, and a second optical system for causing the seed light of first polarization to be incident on the laser medium at an incidence angle larger than 0&#xb0; with respect to the laser medium and input to the excitation region.

Laser device

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Hamamatsu, Japan

Yuki Kabeya