Seiko Instruments Inc

Yuki Hoshi

Hiroaki Uetake

Yoshifumi Nishino

Keiichi Ouchi

A piezoelectric vibrator manufacturing method includes a cavity forming step for forming depressions for a cavities on at least one of two wafers; a bonding electrode film forming step for forming bonding electrode films on bonded surfaces of the both wafers; a mount pattern forming step for forming a pair of mount patterns in the cavity; a through hole forming step for forming a pair of through holes in the cavity; a through electrode forming step for forming a pair of through electrodes electrically connected with the pattern in the cavity; a mount step for electrically connecting the pattern and a piezoelectric vibrating strip, a superimposing step for superimposing the both wafers and storing getter materials; a bonding step for anodically bonding the both wafers to fabricating a wafer member; a gettering step for adjusting the degree of vacuum in the interior of the cavity while measuring a series resonance resistance value; and a cutting step for cutting the wafer member into individual pieces.

Method of manufacturing a piezoelectric vibrator

To provide an airtight terminal and a piezoelectric vibrator having a strong rigidity of a lead despite a small-sized constitution, and provide a method of fabricating an airtight terminal constituting a lead penetrating inside of a stem by one piece and a piezoelectric vibrator with an excellent yield. A stemfilled with a filling memberis penetrated only with one piece of a leadformed from a lead frame. As an electric terminal, a conductive leadconnected to the stemis provided other than the lead. The leadand the conductive leadof an airtight terminalconstituted by the stem, the lead, the filling member, the conductive leadare connected to a piezoelectric vibrating piece, further, the stemis capped to a caseto thereby constitute a piezoelectric vibrator

Airtight terminal

A method is provided for producing a piezoelectric vibrator having an airtight terminal comprised of an annular stem, a lead disposed to pass through the stem and formed of a conductive material, and a filler for fixing the lead in the stem, and the piezoelectric vibrator having a vibrating piece connected to the lead of the airtight terminal and a case bonded to the airtight terminal to cover the vibrating piece. The method comprises an airtight terminal production process that produces the airtight terminal on a lead frame, and a piezoelectric vibrator assembly process that assembles the piezoelectric vibrator using the produced airtight terminal and on the same lead frame on which the airtight terminal is produced.

Piezoelectric vibrator and method for producing the same, an oscillator, an electronic unit and a wave timepiece

Method of fabricating airtight terminals

A method for producing an airtight terminal having an annular stem, a lead passing through the stem and formed of a conductive material, and a filler for fixing the lead in the stem includes (1) a lead contour formation step of disposing a base and a lead formation portion on a plate- or strip-shaped conductive material and forming a contour of the lead on the lead formation portion with at least one end of the lead connected to the base, (2) a filler shaping and sintering step of filling the lead having a contour with the filler in a predetermined position and shaping and sintering the filler, (3) a stem mounting step of mounting the stem to a perimeter of the sintered filler, (4) a firing step of heating, melting, and cooling the sintered filler in the stem and bringing the lead into close contact with the stem to fix the lead to the stem through the filler, (5) a metal film formation step of forming a metal film on a surface of the lead, and (6) a cutting step of separating the one end of the lead from the base.

Method of producing an airtight terminal

To propose a structure of a small-sized airtight terminal capable of restraining a reduction in yield of steps of fabricating an airtight terminal and steps of integrating a piezoelectric vibrator and a mold structure of a surface mount type piezoelectric vibrator in correspondence with the airtight terminal, there is provided a surface mount type piezoelectric vibrator including a piezoelectric vibrating piece having a pair of exciting electrodes, a first electrode of the pair of exciting electrodes being electrically connected to the lead, and a second electrode thereof being electrically connected to a stem of an airtight terminal, a case of a bottomed cylinder type fixed to the stem to cover the piezoelectric vibrating piece to form an airtight space, a first external electrode terminal electrically conductive to the first electrode by way of the lead, a second external electrode terminal electrically conductive to the second electrode, and a mold resin molded to be formed on surfaces of the case and the airtight terminal to expose end portions of the respective first and second external electrode terminals.

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Chiba, Japan

Yuki Hoshi