Omron Corporation

Yuki Honma

Hirotaka Wada

Daisuke Mitsumoto

Sunao Takemura

Hirotaka Ogino

A three-dimensional shape measuring apparatus measures by analyzing an optical pattern projected to the measurement target, and luminance of the optical pattern. The apparatus includes a mounting stage having a reference plane of a height of the measurement target, a measurement head that projects the optical pattern, to the measurement target and reference plane, to capture images of the optical patterns, and a displacement portion displaces the measurement head in a height direction. A phase computing portion computes a phase of the optical pattern in a certain pixel included in the captured image. A height computing portion computes a height of the measurement target based on the phase, and a feed amount computing portion computes a displacement amount based on the height. The height computing portion computes the height based on the phase and corrects the height based on the displacement amount, thereby computing the height of the measurement target.

Three-dimensional shape measuring apparatus, three-dimensional shape measuring method, and three-dimensional shape measuring program

An apparatus for measuring a three-dimensional shape of a target object by analyzing an optical pattern projected onto the target object has an optical pattern projecting device that projects the optical pattern onto a portion of a measurement surface on which the target object is placed, the optical pattern having brightness changing periodically according to a position, a first line sensor that images an optical pattern-emitted region onto which the optical pattern is projected, a second line sensor that images an optical pattern-non-emitted region onto which the optical pattern is not projected, and a processing device that calculates a phase of the optical pattern at a pixel included in an image obtained by removing background information from images taken by the first and second line sensors based on a brightness value of the pixel and a neighboring pixel in the image, and calculates height information based on the calculated phase.

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Joyo, Japan

Yuki Honma