Rigaku Corporation

Yuki Fujimoto

Yasuhiko Nagoshi

Toshiaki Kozuki

An X-ray fluorescence spectrometer includes: a vacuum chamber () configured to be evacuated including at least a detection chamber in which a detector is disposed; drive units (A toH) each including a drive source outside the vacuum chamber (), and configured to perform a mechanical operation in the vacuum chamber (); and a vacuum leakage location identification unit (A,B) configured to: operate the drive units (A toH) one at a time while monitoring a degree of vacuum in the vacuum chamber (); if the change in the degree of vacuum in the vacuum chamber () before and after each operation is greater than or equal to a predetermined threshold, identify the relevant one of the drive units (A toH) as a vacuum leakage location; and cause information to that effect to be displayed in a display unit () and/or be recorded in a recording unit ().

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Takatsuki, Japan

Yuki Fujimoto