Screen Holdings Co., Ltd.

Silicon Light Machines Corporation

Yuki Ashida

Olav Solgaard

James A Hunter

Alexander P Payne

Lars Eng

Stephen Hamann

An optical scanner including micro-electromechanical system phased-arrays suitable for use in a LiDAR system, and methods of operating the same are described. Generally, the scanner includes an optical transmitter having first phased-arrays to receive light from a light source, form a swath of illumination in a far field scene and to modulate phases of the light to sweep or steer the swath over the scene in two-dimensions (2D). An optical receiver in the scanner includes second phased-arrays to receive light from the far field scene and direct at least some of the light onto a detector. The second phased-arrays are configured to de-scan the received light by directing light reflected from the far field scene onto the detector while rejecting background light. In one embodiment the second phased-arrays direct light from a slice of the far field scene onto a 1D detector array.

MEMs phased-array for LiDAR applications

Laser light from a light source part is guided to an irradiation plane by an irradiation optical system. In the irradiation optical system, element lenses are arrayed, and light fluxes that have passed through the element lenses respectively enter transparent elements. Irradiation regions of the light from the element lenses are superimposed on the irradiation plane. When each pair of adjacent target element lenses out of three target element lenses arrayed sequentially is regarded as a target element lens pair, the optical path lengths of three transparent elements corresponding to the three target element lenses are determined such that a peak position of light intensity on the irradiation plane resulting from the interference between the light fluxes through one target element lens pair is different from that corresponding to the other pair. This suppresses variations in light intensity caused by interference between the light fluxes on the irradiation plane.

Light irradiation apparatus, drawing apparatus, and phase difference generator

Growing community of inventors

Kyoto, Japan

Yuki Ashida