Kabushiki Kaisha Toshiba

Kioxia Corporation

Toshiba Digital Solutions Corporation

Yukako Tanaka

Yeonsoo Yang

Go Fujino

Saki Sakai

Yuka Shibata

Katsuya Hino

Fumiaki Oohata

Sho Saiki

Kaito Date

A semiconductor process analysis device of an embodiment includes a memory and a processor connected to the memory. The processor performs factoring to inspection result groups resulting from inspections of a substrate group, the inspections including an inspection of a fabrication process of a semiconductor integrated circuit. The inspection result groups are first distribution groups resulting from a single inspection of each substrate of the substrate group. Each first distribution represents a distribution of inspection data on a substrate surface. The factoring includes calculating, from the first distribution groups, for each of one or more second distributions, appearance information containing a degree of appearance of one of the one or more second distributions in each substrate. The processor calculates a degree of association between two items of the appearance information, the two items respectively corresponding to different inspection result groups among the inspection result groups.

Semiconductor process analysis device, semiconductor process analysis method, and storage medium

An information presentation device includes a plot unit, a histogram generation unit, and a visual information generation unit. The plot unit plots a plurality of values included in each of a plurality of pieces of multidimensional data on a plurality of axes in a parallel coordinate plot coordinate system. The histogram generation unit divides each of the plurality of axes into a plurality of sections, and generates a plurality of histogram bars each of which corresponds to the number of values plotted in each section in the plurality of sections. When one or more values are selected as selected values, the visual information generation unit generates visual information with which the ratio of the number of selected values to the total number of values contained in any one histogram bar out of the respective histogram bars generated by the histogram generation unit can be identified.

Information presentation device, information presentation method, and storage medium

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Yokkaichi, Japan

Yukako Tanaka