Towerjazz Panasonic Semiconductor Co., Ltd.

Yuka Inoue

Nobuyoshi Takahashi

Yasunori Morinaga

Masahiro Oda

Hisashi Yano

Mitsunori Fukura

Yutaka Ito

A semiconductor device includes a first interlayer film formed on an upper surface of a substrate, a first metal wiring line, a second interlayer film, a second metal wiring line, a first via electrically connecting the first metal wiring line and the second metal wiring line, a landing pad embedded in an upper portion of the first interlayer film and penetrating the second interlayer film, and a second via penetrating the substrate and the first interlayer film from a back side of the substrate and connected to the landing pad. The lower surface position of the landing pad is different from that of the first metal wiring line.

Growing community of inventors

Toyama, Japan

Yuka Inoue