Taiwan Semiconductor Manufacturing Comp. Ltd.

Yuk-Tong Lee

Nai-Han Cheng

Chun-Ching Lin

Yung-Fu Yeh

Juan-Lin Chen

Hsing-Hung Lee

An apparatus for monitoring beam currents of an implanter is provided. The apparatus includes a beam-sensing unit for sensing the beam currents; a position-determining unit for determining scan positions; and a computing unit. The computing unit is configured to perform the functions of receiving the beam currents from the beam-sensing unit; receiving the scan positions from the position-determining unit; and determining a drift status of the implanter from the beam currents, wherein the computing unit is configured to receive the beam currents and the scan position periodically between a starting time and an ending time of a scan process of the implanter.

Dosage accuracy monitoring systems of implanters

A system for acquiring semiconductor process status information. An equipment server outputs a start command according to a HSMS protocol to a computer system server, which converts the start command from the HSMS protocol to a RS232 protocol and outputs the converted command to a protocol converter. The protocol converter converts the start command from the RS232 protocol to a RS485 protocol and outputs the converted command to an AD/DA module. The AD/DA module converts the start command from the RS485 command to an analog signal and outputs the converted command to an external sensor, which acquires semiconductor equipment status information as initiated by the start command. The acquired status information is then sent on a reverse path to the start command, undergoing successive conversion and output until reaching the equipment server.

System and method for acquiring semiconductor process status information

In general, the present invention provides a seismic emergency response system (SERS) to control fabrication equipment and material flow for prevention of damage to wafers and equipment within a wafer fabrication plant during an earthquake. The SERS having a facility manager control system having one or a plurality of seismic detection devices, and at least one voting logic device for outputting an alarm triggering signal to a computer integrated manufacturing system; and a computer integrated manufacturing system having an emergency response system and an equipment server (tool application program) for sending a pause equipment command to an associated piece of equipment and a hold lot command to a material execution system to prevent damage of wafers during an earthquake. Optionally provided is one or a plurality of false alarm prevention devices and one or a plurality of enabling switches provided to selectively enable or disable the SERS.

Growing community of inventors

Fongshan, Taiwan

Yuk-Tong Lee