Toshiba Mitsubishi-electric Industrial Systems Corporation

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Yujiro Okihara

Yoichiro Tabata

Tetsuya Saitsu

Noriyuki Nakamura

Koji Ohta

Shinichi Nishimura

Youichiro Tabata

Akaru Usui

Masaki Kuzumoto

Shigenori Yagi

Nobuyuki Itoh

Noboru Wada

Hirozoh Kanegae

Ryohei Ueda

Hiromichi Komiya

Yuji Ganryu

Yasuhiro Tanimura

Hatsuo Yotsumoto

Masayuki Ishikawa

Koji Ota

Hajime Nakatani

Norimitsu Esaki

In an ozone generation apparatus, a discharge cell includes a first electrode part, a second electrode part, and a dielectric partition plate. The first electrode part and the second electrode part face each other, and the dielectric partition plate is provided between the first and second electrode parts.

Ozone generation apparatus

A power supply apparatus includes a controller that performs the following action. The controller determines a target direct-current electric amount value in accordance with an external input. Then, the controller performs feedback control in such a manner that an amount of direct-current electric power input to an inverter reaches the target direct-current electric amount value.

Power-supply apparatus

A power supply apparatus outputs an alternating-current voltage to a plasma generator being a capacitive load and the power supply apparatus has a configuration that a transformer included in the power supply apparatus has a secondary-side magnetizing inductance more than five times as great as a leakage inductance.

Power supply apparatus

A power supply apparatus includes a controller that performs the following action and resonance means for creating a resonance state between the power supply apparatus and a plasma generator. That is, the controller changes, when a value of electric power input equal to 100% (or a value of electric power input equal to or more than a threshold % and equal to or less than 100%) of a rated power is instructed, an inverter frequency and obtains an inverter output power factor for each of a plurality of inverter frequencies. Then, the controller determines, as a driving frequency of the inverter, one of the plurality of inverter frequencies at which the inverter output power factor is maximized.

A current-limiting reactor that regulates a short-circuit current, a controller that controls an action of an inverter, and a detection unit that detects a short circuit. The controller causes the inverter to stop when a short circuit has occurred.

Power supply apparatus outputting alternating-current voltage to plasma generator

In the present invention, a gas pipe integrated block has a plurality of internal pipe paths. The plurality of internal pipe paths are connected to an ozone generator, control means, a raw gas supply port, an ozone gas output port, and cooling water inlet/outlet ports, to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through an automatic pressure controller to the ozone generator. The ozone gas output pipe path extends from the ozone generator through a gas filter, an ozone concentration meter, and a flow rate controller, to the ozone gas output port.

Ozone gas generation unit and ozone gas supply system

In the present invention, a gas flow rate adjustment apparatus that outputs a raw material gas to an ozone generation apparatus is provided. The gas flow rate adjustment apparatus includes a plurality of flow rate adjustment parts, and outputs a second mixed gas serving as the raw material gas to the ozone generation apparatus. The second mixed gas includes an oxygen gas outputted from a first oxygen flow rate adjustment part and a first mixed gas outputted from a mixed gas flow rate adjustment part. The raw material gas generated by the gas flow rate adjustment apparatus, which includes an oxygen gas and a nitrogen gas, contains the nitrogen gas added to the oxygen gas with the rate of addition being in a range of more than 0 PPM and not more than 100 PPM.

Ozone generation system

An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.

Ozone gas supply system

One ozone concentrating chamber is provided therein with a part of a cooling temperature range where ozone can be selectively condensed or an oxygen gas can be selectively removed by transmission from an ozonized oxygen gas, and a part of a temperature range where condensed ozone can be vaporized, and condensed ozone is vaporized by moving condensed ozone with flow of a fluid or by gravitation to the part where condensed ozone can be vaporized, whereby the ozonized oxygen gas can be increased in concentration. Such a constitution is provided that a particle materialfor condensation and vaporization filled in the ozone concentrating chambersandhas a spherical shape of a special shape with multifaceted planes on side surfaces, or an oxygen transmission membranecapable of selectively transmitting an oxygen gas in an ozone gas is provided.

Apparatus for concentrating and diluting specific gas and method for concentrating and diluting specific gas

An apparatus for producing high-concentration ozone gas has a plurality of adsorption/desorption columns and a plurality of valves capable of switching opening/closing of the passage of gas flowing into or out of the adsorption/desorption columns, such that each of the adsorption/desorption columns can performs ozone adsorption processing, evacuation processing or desorption processing. At least two of the adsorption/desorption columns are placed in a serial cycle arrangement to constitute a main adsorption/desorption column group, and one or more of the other adsorption/desorption columns is placed in parallel with the main adsorption/desorption column group to constitute an auxiliary adsorption/desorption column. The auxiliary adsorption/desorption column performs desorption processing during a period in which none of the adsorption/desorption columns of the main adsorption/desorption column group is performing desorption processing.

Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas

Provided is an ozone concentrator including an ozone generator (), adsorption/desorption columns () in which silica gel () cooled with a certain-temperature refrigerant () for concentrating ozone generated by the ozone generator () is packed, a refrigerating machine () for cooling the refrigerant (), a vacuum pump () for enhancing a concentration of the ozone in one of the adsorption/desorption columns () by discharging mainly oxygen from the silica gel () adsorbing the ozone, a plurality of valves () to () for air pressure operations, for switching passages of gas that is allowed to flow in or flow out with respect to the adsorption/desorption columns (), and ozone concentration meters () for measuring the concentration of the ozone enhanced by the vacuum pump (), in which a discharge line of the vacuum pump () is connected to another one of the adsorption/desorption columns (), whereby the ozone is allowed to pass through another one of the adsorption/desorption columns again. Therefore, stable ozone of high concentration can be generated at a satisfactory energy efficiency without any temperature difference between upper and lower positions of adsorption/desorption columns.

Ozone concentrator

This invention provides a new photocatalyst material producing apparatus and photocatalyst material producing method that can produce a large quantity of photocatalyst material of high quality by a chemical reaction in light high-field plasma in a highly oxidative high-concentration ozone medium state, instead of systems to produce a photocatalyst material by PVD and CVD, which are conventional dry deposition methods. In a photocatalyst material producing method and photocatalyst material producing apparatus according to this invention, a pair of facing electrodes are provided via a dielectric material in a discharge gap where gas mainly containing oxygen gas is supplied, and an AC voltage is applied between the electrodes to generate dielectric barrier discharge (silent discharge or creeping discharge) in the discharge gap. Thus, oxygen gas containing ozone gas is created and a metal or metal compound is modified to a photocatalyst material by the dielectric barrier discharge.

Photocatalyst material producing method and photocatalyst material producing apparatus

A compact, inexpensive, large-capacity ozone generator with increased ease of apparatus maintenance. An ozone power supply includes an n-phase inverter for obtaining an AC voltage having a predetermined frequency and outputting an n-phase AC voltage waveform; n reactors and an n-phase transformer for converting an n-phase AC voltage to a high AC voltage; n high-voltage terminals for outputting the n-phase high AC voltage; and a low-voltage terminal having a common potential. Ozone generator units are electrically divided into n pieces within a discharge chamber. Each ozone generator unit includes n high-voltage electrode terminals and one low-voltage electrode terminal, common to all ozone generator units. Each ozone generator unit supports an n-phase AC discharge to generate ozone.

Growing community of inventors

Tokyo, Japan

Yujiro Okihara