Ngk Insulators, Inc.

Ngk Electronics Devices, Inc.

Yuji Umeda

Go Suzuki

Tadashi Otagiri

Jyunji Oogami

In a ceramic sintered body, the Zr content is 17.5 mass %-23.5 mass % in terms of ZrO, the Hf content is 0.3 mass %-0.5 mass % in terms of HfO, the Al content is 74.3 mass %-80.9 mass % in terms of AlO, the Y content is 0.8 mass %-1.9 mass % in terms of YO, the Mg content is 0.1 mass %-0.8 mass % in terms of MgO, the Si content is 0.1 mass %- and 1.5 mass % in terms of SiO, and the Ca content is 0.03 mass %-0.35 mass % in terms of CaO. The total content of Na and K is 0.01 mass %-0.10 mass %, when the K content is converted to KO and the Na content is converted to NaO. The balance content is 0.05 mass % or less in terms of oxide.

Ceramic sintered body and substrate for semiconductor device

In a ceramic joined body wherein a first metalizing layer formed on a surface of an aluminum nitride member on which semiconductor elements are installed and a second metalizing layer formed on a surface of an insulation substrate fireable at low temperatures are joined with each other via a solder used at high temperatures, an intermediate layer including a predetermined metal component and a predetermined glass component is arranged between the insulation substrate and the second metalizing layer. The glass component is melted into the insulation substrate during the firing operation, and thus a sufficient connection strength between the insulation substrate and the aluminum nitride member can be obtained. Moreover, the metal component and the glass component function to make the thermal expansion coefficient an intermediate value between the insulation substrate and the first metalizing layer, and thus heat stress generated during the brazing operation can be eliminated.

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Mine, Japan

Yuji Umeda