Tokyo Electron Limited

Yuji Tsunoda

Hiroyuki Yamamoto

Koji Kubo

Yasushi Takeuchi

Hirofumi Kaneko

Iwao Kumasaka

Makoto Suzuki

Kenjiro Haraki

Satoshi Uemura

A vertical heat treatment apparatus includes: at least one loading and unloading partandfor loading and unloading a carrying containercontaining a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage partthat stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnacethat accommodates a holderholding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transferpart that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading partand a lower loading and unloading partare provided as said at least one loading and unloading part, and a second storage partthat stores a carrying container is disposed between the upper and lower loading and unloading parts. Either one of the loading and unloading partsis utilized as a third storage partthat stores a carrying container. The carrying container storage capacity may be increased and the throughput may be improved.

Vertical heat treatment apparatus and method for operating the same

Substrate treatment equipment and method with testing feature

Growing community of inventors

Tokyo-to, Japan

Yuji Tsunoda