Smc Kabushiki Kaisha

Yuji Tsuda

Tetsuro Maruyama

Akio Sato

Motohiro Sotome

Tadao Watanabe

A workpiece-gripping chuck includes a converting mechanism provided in a body, which converts a driving force from a rotary driving source into a displacement in the axial direction. First and second pistons of the converting mechanism are displaced in the axial direction under a rotary action of a pinion gear. Further, the first and second pistons are displaced in the axial direction, respectively, by supplying a pressure fluid from a first or second port formed in the body. A workpiece may be positioned by means of a pair of gripping members under the driving action of the rotary driving source, and the workpiece is further gripped by the gripping members by applying a pressing force of the pressure fluid in addition to the driving force.

Workpiece-gripping chuck and method for controlling the same

A suck back valve comprises an ON/OFF valve, a suck back mechanism, a first sensor for detecting a displacement amount of a first diaphragm of the ON/OFF valve, and a second sensor for detecting a displacement amount of a second diaphragm corresponding to a suction amount of a coating liquid. The suck back valve further comprises a control unit for feedback-controlling the valve displacement speed of the ON/OFF valve and the suction amount of the coating liquid on the basis of detection signals obtained by the first sensor and the second sensor respectively.

Suck back valve having sensor for detecting diaphragm displacement amount

An electropneumatic regulator system, which has an electropneumatic regulator for controlling a pressure and a flow rate of a fluid supplied from a fluid source on the basis of a level of an input signal, comprises a communication unit for making communication with a master station, and a control unit for controlling the electropneumatic regulator in response to at least the contents of communication data received by the communication unit. Accordingly, it is possible to collectively control one or more electropneumatic regulators by using, for example, the master station on the basis of the communication so that the response performance can be improved for the remote control of the electropneumatic regulators, and the cost can be reduced.

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Hadano, Japan

Yuji Tsuda